Research Papers

Effects of Pulse Duration on Laser Micro Polishing

[+] Author and Article Information
Madhu Vadali

Graduate Research Assistant
e-mail: vadali@wisc.edu

Chao Ma

Graduate Research Assistant
e-mail: cma25@wisc.edu

Neil A. Duffie

Fellow ASME
e-mail: duffie@engr.wisc.edu

Xiaochun Li

ASME member
e-mail: xcli@engr.wisc.edu

Frank E. Pfefferkorn

Associate Professor
e-mail: pfefferk@engr.wisc.edu
Mechanical Engineering Department,
University of Wisconsin–Madison,
Madison, WI 53706

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO AND NANO-MANUFACTURING. Manuscript received September 21, 2012; final manuscript received January 19, 2013; published online March 25, 2013. Assoc. Editor: Stefan Dimov.

J. Micro Nano-Manuf 1(1), 011006 (Mar 25, 2013) (9 pages) Paper No: JMNM-12-1064; doi: 10.1115/1.4023756 History: Received September 21, 2012; Revised January 19, 2013

Pulsed laser micro polishing (PLμP) has been shown to be an effective method of polishing micro metallic parts whose surface roughness can approach the feature size. Laser pulse duration in the PLμP process is an important parameter that significantly affects the achievable surface finish. This paper describes the influence of laser pulse duration on surface roughness reduction during PLμP. For this purpose, near-infrared laser pulses have been used to polish Ti6Al4V at three different pulse durations: 0.65 μs, 1.91 μs, and 3.60 μs. PLμP at longer pulse durations resulted in dominating Marangoni convective flows, yet significantly higher reductions in the average surface roughness were observed compared to the short pulse duration regime without convection.

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Martan, J., Cibulka, O., and Semmar, N., 2006, “Nanosecond Pulse Laser Melting Investigation by IR Radiometry and Reflection-based Methods,” Appl. Surf. Sci., 253(3), pp. 1170–1177. [CrossRef]
Pendleton, W. E., Williams, G. P., Williams, R. T., Wu, J. C., Cvijanovich, G. B., Joyce, J. L., and McCleaf, M., 1993, “Scanning Tunneling Microscopy of Nickel Surface Features Before and After Rapid Melting by Excimer Laser,” AMP J. Technol., 3, pp. 75–84.
Lamikiz, A., Sanchez, J. A., de Lacalle, L. N. L., del Pozo, D., and Etayo, J. M., 2006, “Surface Roughness Improvement using Laser-Polishing Techniques,” Adv. Mater. Process. Technol., 526, pp. 217–222. [CrossRef]
Ramos-Grez, J. A., and Bourell, D. L., 2004, “Reducing Surface Roughness of Metallic Freeform-Fabricated Parts Using Non-Tactile Finishing Methods,” Int. J. Mater. Product Technol., 21(4), pp. 297–316. [CrossRef]
Willenborg, E., Wissenbach, K., and Poprawe, R., 2003, “Polishing by Laser Radiation,” Proceedings of the Second International WLT-Conference on Lasers in Manufacturing, pp. 297–300.
Marella, P. F., Tuckerman, D. B., and Pease, R. F., 1989, “Modeling of Laser Planarization of Thin Metal-Films,” Appl. Phys. Lett., 54(12), pp. 1109–1111. [CrossRef]
Tuckerman, D. B., and Weisberg, A. H., 1986, “Planarization of Gold and Aluminum Thin-Films Using a Pulsed Laser,” IEEE Electron. Dev. Lett., 7(1), pp. 1–4. [CrossRef]
Temmler, A., Graichen, K., and Donath, J., 2010, “Laser Polishing in Medical Engineering; Laser Polishing of Components for Left Ventricular Assist Devices,” Laser Tech. J., 7(2), pp. 53–57. [CrossRef]
Bereznai, M., Pelsoczi, I., Toth, Z., Turzo, K., Radnai, M., Bor, Z., and Fazekas, A., 2003, “Surface Modifications Induced by ns and sub-ps Excimer Laser Pulses on Titanium Implant Material,” Biomaterials, 24(23), pp. 4197–4203. [CrossRef] [PubMed]
Kim, Y. G., Ryu, J. K., Kim, D. J., Kim, H. J., Lee, S., Cha, B. H., Cha, H., and Kim, C. J., 2004, “Microroughness Reduction of Tungsten Films by Laser Polishing Technology With a Line Beam,” Jpn. J. Appl. Phys., Part 1, 43(4A), pp. 1315–1322. [CrossRef]
Perry, T. L., Werschmoeller, D., Li, X., Pfefferkorn, F. E., and Duffie, N. A., 2009, “Pulsed Laser Polishing of Micro-Milled Ti6Al4V Samples,” J. Manuf. Process., 11(2), pp. 74–81. [CrossRef]
Perry, T. L., Werschmoeller, D., Li, X. C., Pfefferkorn, F. E., and Duffie, N. A., 2009, “The Effect of Laser Pulse Duration and Feed Rate on Pulsed Laser Polishing of Microfabricated Nickel Samples,” ASME J. Manuf. Sci. Eng., 131(3), p. 031002. [CrossRef]
Perry, T. L., Werschmoeller, D., Duffie, N. A., Li, X. C., and Pfefferkorn, F. E., 2009, “Examination of Selective Pulsed Laser Micropolishing on Microfabricated Nickel Samples Using Spatial Frequency Analysis,” ASME J. Manuf. Sci. Eng., 131(2), p. 021002. [CrossRef]
Vadali, M., Ma, C., Duffie, N. A., Li, X., and Pfefferkorn, F. E., 2012, “Pulsed Laser Micro Polishing: Surface Prediction Model,” SME J. Manuf. Technol., 14, pp. 307–315.
Landau, L. D., and Lifshits, E. M., 1959, Fluid Mechanics, Pergamon Press, Oxford, UK.
Nüsser, C., Wehrmann, I., and Willenborg, E., 2011, “Influence of Intensity Distribution and Pulse Duration on Laser Micro Polishing,” Phys. Procedia, 12, pp. 462–471. [CrossRef]
Bagno, A., Genovese, M., Luchini, A., Dettin, M., Conconi, M. T., Menti, A. M., Parnigotto, P. P., and Di Bello, C., 2004, “Contact Profilometry and Correspondence Analysis to Correlate Surface Properties and Cell Adhesion In Vitro of Uncoated and Coated Ti and Ti6Al4V disks,” Biomaterials, 25(12), pp. 2437–2445. [CrossRef] [PubMed]
Borsari, V., Giavaresi, G., Fini, M., Torricelli, P., Salito, A., Chiesa, R., Chiusoli, L., Volpert, A., Rimondini, L., and Giardino, R., 2005, “Physical Characterization of Different-Roughness Titanium Surfaces, With and Without Hydroxyapatite Coating, and Their Effect on Human Osteoblast-Like Cells,” J. Biomed. Mater. Res., Part B: Appl. Biomater., 75B(2), pp. 359–368. [CrossRef]
Khang, D., Lu, J., Yao, C., Haberstroh, K. M., and Webster, T. J., 2008, “The Role of Nanometer and Sub-Micron Surface Features on Vascular and Bone Cell Adhesion on Titanium,” Biomaterials, 29(8), pp. 970–983. [CrossRef] [PubMed]
Ponsonnet, L., Reybier, K., Jaffrezic, N., Comte, V., Lagneau, C., Lissac, M., and Martelet, C., 2003, “Relationship Between Surface Properties (Roughness, Wettability) of Titanium and Titanium Alloys and Cell Behaviour,” Mater. Sci. Eng., C, 23(4), pp. 551–560 [CrossRef]
ISO, 2006, “ISO 11554:2006, Optics and Photonics-Lasers And Laser-Related Equipment-Test Methods for Laser Beam Power, Energy and Temporal Characteristics,” ISO, Geneva, Switzerland.
ISO, 2005, “ISO 11145, Optics and Photonics-Lasers and Laser-Related Equipment-Vocabulary and Symbols,” ISO, Geneva, Switzerland.
ASME, 2009, “Surface Texture: Surface Roughness, Waviness, and Lay; ASME B46.1-2009 (Revision of ASME B46.1-2002),” American Society of Mechanical Engineers, New York.
ISO, 2011, “ISO 16610-21, Geometrical Product Specifications (GPS) – Filtration – Part 21: Linear Profile Filters: Gaussian Filters,” ISO, Geneva, Switzerland.
Heiple, C. R., and Roper, J. R., 1982, “Mechanism for Minor Element Effect on GTA Fusion Zone Geometry,” Weld. J., 61(4), pp. 97s–102s.
Kou, S., Limmaneevichitr, C., and Wei, P. S., 2011, “Oscillatory Marangoni Flow: A Fundamental Study by Conduction-Mode Laser Spot Welding,” Weld. J., 90, pp. 229s–240s.


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Fig. 1

Reflected light image of a typical Ti6Al4V micro end milled surface

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Fig. 2

Experimental laser polishing setup

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Fig. 4

Intensity profiles of focused laser beams. (a) Nd:YAG and (b) Fiber laser

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Fig. 3

Temporal profiles of laser pulses (a) 0.65 μs, Nd:YAG Laser, (b) 1.91 μs, Fiber Laser, and (c) 3.60 μs, Fiber Laser

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Fig. 8

Surface height data of the (a) unpolished, (b) polished at 0.65 μs, (c) polished at 1.91 μs, and (d) polished at 3.60 μs

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Fig. 7

Schematic of the zig-zag path

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Fig. 11

Cross section images of (a) line, (b) area polished at 0.65 μs

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Fig. 10

Illustrative schematic of a typical cross section line scan

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Fig. 9

Overlaid 2D frequency spectra of unpolished, and polished (0.65 μs, 1.91 μs, and 3.60 μs). (a) Projected x-frequency spectra and (b) Projected y-frequency spectra

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Fig. 12

Cross section images of (a) line (b) area polished at 1.91 μs

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Fig. 13

Cross section images of (a) line, (b) area polished at 3.60 μs

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Fig. 14

Comparison of experimental (polished) and theoretical (predicted) 2D frequency spectra at 0.65 μs. (a) Projected x-frequency spectra and (b) Projected y-frequency spectra

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Fig. 15

Comparison of experimental (polished) and theoretical (predicted) 2D frequency spectra at 1.91 μs. (a) Projected x-frequency spectra and (b) Projected y-frequency spectra

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Fig. 16

Comparison of experimental (polished) and theoretical (predicted) 2D frequency spectra at 3.60 μs. (a) Projected x-frequency spectra and (b) projected y-frequency spectra.

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Fig. 17

Magnified cross section images showing surface ripples at (a) 1.91 μs and (b) 3.6 μs

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Fig. 6

Overlaid 2D frequency spectra of unpolished, and polished (0.65 μs, 1.91 μs, and 3.60 μs). (a) Projected x-frequency spectra and (b) projected y-frequency spectra

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Fig. 5

PLμP surface finish prediction methodology [14]




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