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Research Papers

Data Fusion Strategy for Multiscale Surface Measurements

[+] Author and Article Information
Suresh K. Ramasamy

e-mail: sureshramasamy@gmail.com

Brian D. Boudreau

Department of Mechanical Engineering
and Engineering Science,
University of North Carolina at Charlotte,
9201 University City Blvd.,
Charlotte, NC 28223

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO AND NANO-MANUFACTURING. Manuscript received May 30, 2012; final manuscript received January 25, 2013; published online March 25, 2013. Assoc. Editor: Brad Nelson.

J. Micro Nano-Manuf 1(1), 011004 (Mar 25, 2013) (6 pages) Paper No: JMNM-12-1032; doi: 10.1115/1.4023755 History: Received May 30, 2012; Revised January 25, 2013

Interdisciplinary research efforts have started focusing on the development of multiscale models and development of designer multiscale surfaces exhibiting specific properties at different scales for a specific purpose. With the rapid evolution of these new engineered surfaces for microelectromechanical systems (MEMS), microfluidics, etc., there is a strong need for developing tools to measure and characterize these surfaces at different scales. In order to obtain all meaningful details of the surface at various required scales, one is left with the only option of measuring the surface using multiple technologies using a combination of instruments. The majority of hardware-based approaches focus on the development of systems housing multiple technologies/capabilities into a single frame. These systems enable the user to obtain different surface maps using various technologies, but the user does not readily have the ability to combine all the obtained data into one single dataset. The effective approach toward multiscale measurement and characterization would be to use the individual measurement tools and finding a method to relate the individual coordinate systems and use an offline virtual tool to unify, manipulate, segment, merge, and retrieve data. Shape primitives and focus-based fusion strategies cannot be used as every data point in the data sets under consideration has to be treated as essentially at optimal focus. A multiscale data fusion strategy results in edge effects on nonplanar and high aspect ratio surfaces. An optimized fusion strategy, the “FWR method,” for the surface metrology domain is proposed where the subimages obtained from discrete wavelet frame (DWF) were separated into three regimes—form, waviness, and roughness—and fusion was not performed on subimages in the form regime. This approach effectively eliminates the edge effects. Individual data-point-level fusion was successfully demonstrated on Fresnel microlens array surface data as a case study of a nondirectional engineered surface with high aspect ratio.

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References

Hansen, H. N., Carneiro, K., Haitjema, H., and Chiffre, L. D., 2006, “Dimensional Micro and Nano Metrology,” Ann. CIRP, 55(Pt 2), pp. 721–743. [CrossRef]
Koch, K., Bhushan, B., and Barthlott, W., 2009, “Multifunctional Surface Structures of Plants: An inspiration for Biomimetics,” Prog. Mater. Sci., 54, pp. 137–178. [CrossRef]
Northern, M. T., and Turner, K. L., 2006, “Meso-Scale Adhesion Testing of Integrated Micro- and Nano-Scale Structures,” Sensor. Actuator. A, 130–131, pp. 583–587. [CrossRef]
Bewilogua, K., Brauer, G., Dietz, A., Gabler, J., Goch, G., Karpuschewski, B., and Szyszka, B., 2009, “Surface technology for automotive engineering,” CIRP Annals, Manufacturing Technology, 58(2), pp. 608–627. [CrossRef]
Stout, K. J., and Blunt, L., 2001, “A Contribution to the Debate on Surface Classifications—Random, Systematic, Unstructured, Structured and Engineered,” Int. J. Mach. Tool Manuf., 41, pp. 2039–2044. [CrossRef]
Zygo.com, 2011, “ZYGO Metrology Services Division,” February 2, 2011, Available at www.zygo.com/?/met/profilers/
Werthinc.com, 2011, “Werth Messtechnik,” February 2, 2011, Available at www.werthinc.com
Frtofamerica.com, 2011, “FRT of America, LLC,” February 2, 2011, available at www.frtofamerica.com/us/products/microglider-series/microglider/
Topfer, S. C. N., Nehse, U., and Linb, G., 2007, “Automated Inspections for Dimensional Micro- and Nanometrology,” Measurement, 40, pp. 243–254. [CrossRef]
Kayser, D., Bothe, T., and Osten, W., 2004, “Scaled Topometry in a Multisensor Approach,” Soc. Photo-Opt. Instru., 43(10), pp. 2469–2477. [CrossRef]
Osten, W., Kayser, D., Bothe, T., and Juptner, W., 2000, “High Resolution Measurement of Extended Technical Surfaces With Scalable Topometry,” Proc. SPIE 4101, Laser Interferometry X: Techniques and Analysis, 168, pp. 166–172. [CrossRef]
Solarius-inc.com, “Solarius Development Inc; c2003–07,” February 2, 2011, www.solarius-inc.com/html/sensofar.html
Bruker, “Bruker AXS; c2011, February 2, 2011, www.bruker-axs.de/stylus_and_optical_metrology.html
WITec GmbH [Internet]. Confocal Raman and Atomic Force Microscope alpha500 (cited February 2, 2011), available at http://www.witec.de/en/products/raman/alpha500/
Geomagic [Internet]. Geomagic Studio Overview (cited February 2, 2011), available at http://www.geomagic.com/en/products/studio/
Data fusion lexicon, Data Fusion Subpanel of the Joint Directors of Laboratories. Technical Panel for C3. U.S. Department of Defense. 1991. Available at http://www.dtic.mil/dtic/tr/fulltext/u2/a529661.pdf
Ranchin, T., and Wald, L., 2007, “Data Fusion of Remotely Sensed Images Using the Wavelet Transform: The ARSIS Solution,” Proc. SPIE, 3169, pp. 272–280. [CrossRef]
Chibani, Y., 2006, “Additive Integration of SAR Features Into Multispectral SPOT Images by Means of the à Trous Wavelet Decomposition,” ISPRS Journal of Photogrammetry and Remote Sensing, 60(5), pp. 306–314. [CrossRef]
Artigas, R., Pinto, A., and Laguarta, F., 1999, “Three-Dimensional Micro-Measurements on Smooth and Rough Surfaces With a New Confocal Optical Profiler,” Proc. SPIE 3824, Optical Measurement Systems for Industrial Inspection, 93, pp. 93–104. [CrossRef]
Shaw, L., and Weckenmann, A., 2010, “Optical 3D-Characterization for Multiscale Workpieces,” 10th International Symposium on Measurement and Quality Control, September, 5–9.
Weckenmann, A., Jiang, X., Sommer, K. D., Neuschaefer-Rube, U., Seewig, J., Shaw, L., and Estler, T., 2009, “Multisensor Data Fusion in Dimensional Metrology,” Ann. CIRP Manuf. Tech., 58, pp. 701–721. [CrossRef]
Ramasamy, S. K., 2011, “Multi-Scale Data Fusion for Surface Metrology,” Ph.D. thesis, University of North Carolina at Charlotte, Charlotte, NC.
Ramasamy, S. K., Raja, J., and Boudreau, B. D., 2012, “Multi-Sensor Data Fusion in Surface and Dimensional Metrology Domains,” Proceedings of 40th North American Manufacturing Research Conference, University of Notre Dame, IN, June 2012.
Sheppard, C. J. R., and Wilson, T., 1979, “Effect of Spherical Aberration on the Imaging Properties of Scanning Optical Microscopes,” Appl. Opt., 18(7), pp. 1058–1063. [CrossRef] [PubMed]
Doi, T., Vorburger, T., and Sullivan, P., 1999, “Effects of Defocus and Algorithm on Optical Step Height Calibration,” Prec. Eng., 23, pp. 135–143. [CrossRef]
Donoho, D. L., 1995, “De-Noising by Soft-Thresholding,” IEEE Trans. Inform. Theory, 41(3), pp. 613–627. [CrossRef]
Krim, H., Tucker, D., Mallat, S., and Donoho, D. L., 1999, “On Denoising and Best Signal Representation,” IEEE Trans. Inform. Theory, 45(7), pp. 2225–2238. [CrossRef]
Raol, J. R., 2009, “Performance Evaluation of Image Based Data Fusion Systems,” Multi-Sensor Data Fusion withMATLAB, CRC Press, Boca Raton, FL, pp. 415–476.
Wang, M. Y., Fitzpatrick, J. M., and Maurer, C. R., 1995, “Design of Fiducials for Accurate Registration of CT and MR Volume Images,” Proc. SPIE Medical Imaging 1995, 2434, pp. 96–108. [CrossRef]
Besl, P. J., and McKay, N. D., 1992, “A Method for Registration of 3-D Shapes,” IEEE Trans. Pattern Anal., 14(2), pp. 239–256. [CrossRef]
Mallat, S., 1989, “A Theory for Multi Resolution Signal Decomposition: The Wavelet Representation,” IEEE Trans. Pattern Anal., 11, pp. 674–693. [CrossRef]
Shensa, M. J., 1992, “Discrete Wavelet Transforms: Wedding the à Trous and Mallat Algorithms,” IEEE Trans. Signal Proces., 40, pp. 2464–2482. [CrossRef]
Raja, J., Muralikrishnan, B., and Fu, S., 2002, “Recent Advances in Separation of Roughness, Waviness and Form,” Precision Engineering, 26(2), pp. 222–235. [CrossRef]
Chen, H., Liu, Y., and Wang, Y., 2008, “A Novel Image Fusion Method Based on Wavelet Packet Transform,” IEEE International Symposium on Knowledge Acquisition and Modeling, pp. 462–465. [CrossRef]
Song, Y., Li, M., Li, Q., and SunL., 2006, “A New Wavelet Based Multi-Focus Image Fusion Scheme and Its Application on Optical Microscopy,” Proceedings of the 2006 IEEE International Conference on Robotics and Biomimetics, Kunming, China, pp. 401–405.
Li, H., Guo, L., and Liu, H., 2005, “Current Research on Wavelet-Based Image Fusion Algorithms, Multisensor, Multisource Information Fusion: Architectures, Algorithms, and Applications,” 2005 Proc. SPIE, 5813, pp. 360–367. [CrossRef]

Figures

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Fig. 1

Fresnel microlens array at (a) 5X magnification and (b) 20X magnification

Grahic Jump Location
Fig. 2

Schematic of FWR data fusion for surface metrology datasets (a) original data, (b) precondition (outlier removal, resample, and resize), (c) coarse registration, (d) fine registration after control point detection, (e) multiscale decomposition on selected same size area from both data, (f) multiscale fusion, (g) inverse transform on fused subdatasets to obtain fused data, (h) fused data replaced to the original location

Grahic Jump Location
Fig. 3

Six wavelet planes obtained from: (a) low magnification data; (b) high magnification data to obtain and (c) new set of six wavelet planes

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Fig. 4

Fused data on Fresnel lens

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Fig. 5

Zoomed in view of fused data on Fresnel lens

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Fig. 6

(a) Fused data obtained when all planes are considered for fusion; (b) fused data obtained when only roughness and waviness planes are considered for fusion

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