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Research Papers

Effects of Pulse Duration on Laser Micro Polishing

[+] Author and Article Information
Madhu Vadali

Graduate Research Assistant
e-mail: vadali@wisc.edu

Chao Ma

Graduate Research Assistant
e-mail: cma25@wisc.edu

Neil A. Duffie

Professor
Fellow ASME
e-mail: duffie@engr.wisc.edu

Xiaochun Li

Professor
ASME member
e-mail: xcli@engr.wisc.edu

Frank E. Pfefferkorn

Associate Professor
Mem. ASME
e-mail: pfefferk@engr.wisc.edu
Mechanical Engineering Department,
University of Wisconsin–Madison,
Madison, WI 53706

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO AND NANO-MANUFACTURING. Manuscript received September 21, 2012; final manuscript received January 19, 2013; published online March 25, 2013. Assoc. Editor: Stefan Dimov.

J. Micro Nano-Manuf 1(1), 011006 (Mar 25, 2013) (9 pages) Paper No: JMNM-12-1064; doi: 10.1115/1.4023756 History: Received September 21, 2012; Revised January 19, 2013

Pulsed laser micro polishing (PLμP) has been shown to be an effective method of polishing micro metallic parts whose surface roughness can approach the feature size. Laser pulse duration in the PLμP process is an important parameter that significantly affects the achievable surface finish. This paper describes the influence of laser pulse duration on surface roughness reduction during PLμP. For this purpose, near-infrared laser pulses have been used to polish Ti6Al4V at three different pulse durations: 0.65 μs, 1.91 μs, and 3.60 μs. PLμP at longer pulse durations resulted in dominating Marangoni convective flows, yet significantly higher reductions in the average surface roughness were observed compared to the short pulse duration regime without convection.

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Figures

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Fig. 1

Reflected light image of a typical Ti6Al4V micro end milled surface

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Fig. 2

Experimental laser polishing setup

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Fig. 3

Temporal profiles of laser pulses (a) 0.65 μs, Nd:YAG Laser, (b) 1.91 μs, Fiber Laser, and (c) 3.60 μs, Fiber Laser

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Fig. 4

Intensity profiles of focused laser beams. (a) Nd:YAG and (b) Fiber laser

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Fig. 5

PLμP surface finish prediction methodology [14]

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Fig. 6

Overlaid 2D frequency spectra of unpolished, and polished (0.65 μs, 1.91 μs, and 3.60 μs). (a) Projected x-frequency spectra and (b) projected y-frequency spectra

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Fig. 7

Schematic of the zig-zag path

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Fig. 8

Surface height data of the (a) unpolished, (b) polished at 0.65 μs, (c) polished at 1.91 μs, and (d) polished at 3.60 μs

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Fig. 9

Overlaid 2D frequency spectra of unpolished, and polished (0.65 μs, 1.91 μs, and 3.60 μs). (a) Projected x-frequency spectra and (b) Projected y-frequency spectra

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Fig. 10

Illustrative schematic of a typical cross section line scan

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Fig. 11

Cross section images of (a) line, (b) area polished at 0.65 μs

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Fig. 12

Cross section images of (a) line (b) area polished at 1.91 μs

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Fig. 13

Cross section images of (a) line, (b) area polished at 3.60 μs

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Fig. 14

Comparison of experimental (polished) and theoretical (predicted) 2D frequency spectra at 0.65 μs. (a) Projected x-frequency spectra and (b) Projected y-frequency spectra

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Fig. 15

Comparison of experimental (polished) and theoretical (predicted) 2D frequency spectra at 1.91 μs. (a) Projected x-frequency spectra and (b) Projected y-frequency spectra

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Fig. 16

Comparison of experimental (polished) and theoretical (predicted) 2D frequency spectra at 3.60 μs. (a) Projected x-frequency spectra and (b) projected y-frequency spectra.

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Fig. 17

Magnified cross section images showing surface ripples at (a) 1.91 μs and (b) 3.6 μs

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