Elastic deformation molding method is a newly developed aspheric machining technology which can convert complex aspherical surface machining to simple flat surface machining. The residual stress induced in lapping process of elastic deformation molding method has significant influence on machining precision. In this paper, the influence of residual stress induced lapping process on machining accuracy is analyzed and discussed through experiment. An experiment with elimination of residual stress is carried out. The machining result shows that distortion amount has reduced form 2 μm to 0.8 μm, which means the residual stress can be effectively eliminated. A machining form accuracy of P-V 0.56 μm is obtained.