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Research Papers

Fast Dispersive Laser Scanner by Using Digital Micro Mirror Arrays

[+] Author and Article Information
Salih K. Kalyoncu

The Scientific and Technological
Research Council of Turkey,
Gebze 41400, Turkey;
EECS Department,
University of California,
Irvine, CA 92697
e-mail: skalyonc@uci.edu

Rasul Torun

EECS Department,
University of California,
Irvine, CA 92697;
EECS Department,
Istanbul Sehir University,
Istanbul 34662, Turkey
e-mail: rtorun@uci.edu

Yuewang Huang

EECS Department,
University of California,
Irvine, CA 92697
e-mail: yuewangh@uci.edu

Qiancheng Zhao

EECS Department,
University of California,
Irvine, CA 92697
e-mail: qianchez@uci.edu

Ozdal Boyraz

EECS Department,
University of California,
Irvine, CA 92697;
EECS Department,
Istanbul Sehir University,
Istanbul 34662, Turkey
e-mail: oboyraz@uci.edu

Contributed by the Manufacturing Engineering of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received July 11, 2013; final manuscript received February 26, 2014; published online April 8, 2014. Assoc. Editor: Liwei Lin.

J. Micro Nano-Manuf 2(2), 021004 (Apr 08, 2014) (6 pages) Paper No: JMNM-13-1055; doi: 10.1115/1.4027127 History: Received July 11, 2013; Revised February 26, 2014

We demonstrate a fast dispersive laser scanning system by using MEMS digital micro-mirror arrays technology. The proposed technique utilizes real-time dispersive imaging system, which captures spectrally encoded images with a single photodetector at pulse repetition rate via space-to-time mapping technology. Wide area scanning capability is introduced by using individually addressable micro-mirror arrays as a beam deflector. Experimentally, we scanned ∼20 mm2 at scan rate of 5 kHz with ∼150 μm lateral and ∼160 μm vertical resolution that can be controlled by using 1024 × 768 mirror arrays. With the current state of art MEMS technology, fast scanning with <30 μs and resolution down to single mirror pitch size of 10.8 μm is also achievable.

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Figures

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Fig. 1

The experimental setup for all optical reflective parallelized N-channel dispersive laser scanner (a). The single channel setup is used for the proof-of-concept demonstration. The supercontinuum pulse generation (b) and the amplified dispersive Fourier transform (c) modules.

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Fig. 2

DMD as a programmable beam steering technology (a) [35]. A single DMD consists of 768 × 1024 micro mirrors and inset shows the SEM image of micro mirrors (b). Schematics of individual micro mirrors (c) [36].

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Fig. 3

The spatial resolution of the focusing system depends on the diffraction limit and is impoved by increasing diffraction parameter, r = d/f (a). The temporal resolution (calculated for D = −675 ps/nm) due to the RF bandwidth limits the spatial resolution via time-to-space mapping (b) [32].

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Fig. 4

The horizontal strip-type binary patterns created on DMD for laser scanning. The position of the NXM spatial mask is vertically scanned over the object by loading DMD with these dynamic patterns.

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Fig. 5

The lateral resolution performance of space wavelength mapping. The vertical bars with dimensions of ∼150 μm to ∼220 μm are captured by the ∼13.5 ns SC pulses.

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Fig. 6

Comparison between a CCD image (a) and a digitally reconstructed scan image of the target: USAF test chart Group = 1, Element 3–6 (width/line 198 μm–140 μm) (b) and Group = 0, Element 5–6 (width/line 314 μm–280 μm) (c)

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