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Technical Brief

Fabrication and Characterization of Photonic Crystals in Photopolymer SZ2080 by Two-Photon Polymerization Using a Femtosecond Laser

[+] Author and Article Information
Yinan Tian, Hyukjoon Kwon, Galen B. King

Center for Laser-Based Manufacturing,
School of Mechanical Engineering,
Purdue University,
West Lafayette, IN 47907

Yung C. Shin

Center for Laser-Based Manufacturing,
School of Mechanical Engineering,
Purdue University,
West Lafayette, IN 47907
e-mail: shin@purdue.edu

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received May 31, 2013; final manuscript received May 20, 2014; published online July 8, 2014. Assoc. Editor: Nicholas Fang.

J. Micro Nano-Manuf 2(3), 034501 (Jul 08, 2014) (5 pages) Paper No: JMNM-13-1041; doi: 10.1115/1.4027737 History: Received May 31, 2013; Revised May 20, 2014

Two-photon polymerization (2PP) is a powerful technique in fabricating three-dimensional subdiffraction-limited structures. In this paper, 2PP was applied to generate woodpile structures, one kind of photonic crystal, using SZ2080, which is widely used in 2PP due to its negligible shrinkage. First, the relationship between scanning speed, laser power, and resolution was determined through fabricating free-hanging lines by theoretical and experimental study. Based on this relationship, woodpile structures with different period distances were fabricated with high uniformity as shown by scanning electron microscopy (SEM) images. Then optical properties of woodpile structures were investigated using Fourier transform infrared spectroscopy (FTIR) and a quantitative empirical relationship between period distance and band gaps was established. The empirical relationship can be applied to design woodpile photonic crystals for the optical sensors and filters.

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Figures

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Fig. 1

Experimental setup

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Fig. 2

Sketch of woodpile structure

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Fig. 3

SEM image of structure in resolution experiment

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Fig. 4

The relationship between resolution and laser power, scanning speed

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Fig. 5

Woodpile structure with d = 2.1 μm

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Fig. 6

Woodpile structure with d = 2.9 μm

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Fig. 7

Side view of woodpile structure

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Fig. 8

Top view of woodpile structure

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Fig. 9

Transmittance spectra of woodpile structures

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Fig. 10

Relationship between band gap and period distance

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