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Technical Brief

A Low-Cost and High-Resolution Micromachine Tool With Toggle-Based Mechanism

[+] Author and Article Information
Shih-Ming Wang

Department of Mechanical Engineering,
Chung Yuan Christian University,
No. 200, Chung-pei Road,
Chung-Li 32023, Taiwan, China
e-mail: shihming@cycu.edu.tw

Zhe-Zhi Ye

Department of Mechanical Engineering,
Chung Yuan Christian University,
No. 200, Chung-pei Road,
Chung-Li 32023, Taiwan, China
e-mail: stan6212@yahoo.com.tw

Chih-Peng Yang

Department of Mechanical Engineering,
Chung Yuan Christian University,
No. 200, Chung-pei Road,
Chung-Li 32023, Taiwan, China
e-mail: awam007@yahoo.com.tw

Chuntai Yen

Innovative DigiTech-Enable
Applications & Services Institute,
11th Floor, No. 106, Da-an District,
Peace Road,
Taipei 10622, Taiwan, China
e-mail: sec.nelsonyen@servtech.com.tw

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received April 6, 2014; final manuscript received October 9, 2014; published online November 14, 2014. Assoc. Editor: Hongqiang Chen.

J. Micro Nano-Manuf 3(1), 014501 (Mar 01, 2015) (5 pages) Paper No: JMNM-14-1023; doi: 10.1115/1.4028878 History: Received April 06, 2014; Revised October 09, 2014; Online November 14, 2014

The products of 3C, bioscience, medical industry, and aerospace industry are becoming smaller and smaller. The components of the products are made of various materials with complex 3D shapes requiring high accuracy in their dimensions and contours. An accurate micro-/mesoscale computer numerical control (CNC) machine tool is an essential part of this technology. A new type of CNC micromachine tool with a togglelike mechanism having the characteristics of low-cost and fine-resolution was developed. With geometric reduction principle, the machine can provide finer feed resolution and better positioning accuracy without using high-end driving components and controller. The kinematics model and characteristics of the machine were derived and analyzed. Modal analysis and dynamic compliance analysis were employed to design a light-weight structure with good stiffness. The accuracy calibration results showed the machine can reach a positioning accuracy of 500 nm. Prototype of the machine was built, and furthermore, some micromachining examples were demonstrated in this paper.

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References

Dutta, K., Dev, P., Dewilde, P., Shara, A., and Newcomb, R., 1970, “Integrated Micro-Motor Concepts,” Proceeding of ICMCST, Sydney, Australia, Aug. 18–21, pp. 36–37.
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Figures

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Fig. 1

Scheme of the developed micromachine tool

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Fig. 2

Principle of the togglelike mechanism

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Fig. 3

Relationship between feed resolution and toggle angle (a) angle range: 0—90 deg and (b) angle range: 50—90 deg

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Fig. 4

Correlation between feed resolution of table, X, and L

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Fig. 5

Modal analysis for x-direction togglelike mechanism: (a) first modal (186.86 Hz) and (b) second modal (344.33 Hz)

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Fig. 6

Modal analysis for y-direction togglelike mechanism: (a) first modal (305.60 Hz) and (b) second modal (332.05 Hz)

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Fig. 7

Modal analysis for machine column with togglelike mechanism: (a) first modal (547.02 Hz) and (b) second modal (720.25 Hz)

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Fig. 8

Dynamic compliance analysis results of the machine column with spindle head (a) with 20 N x-direction force and (b) with 20 N y-direction force

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Fig. 9

The 3DOF micromachine tool with togglelike mechanism

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Fig. 10

Setup for accuracy measurement for y-axis

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Fig. 11

Drawing and workpiece of nine microholes (a) drawing and (b) workpiece

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Fig. 12

3D pyramidlike microworkpiece

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