The trend toward miniaturization of metallic microparts results in the need of high-precision production methods. Major challenges are, for example, downsizing of tools and adequate positioning accuracy within blanking. Starting from a novel approach for tool miniaturization and its realization, the aim of this study is showing the assessment of tool sensitivity against process errors. Etched silicon punches were used for blanking copper foils, where outbreaks occurred at the cutting edge. Hence, tool stresses during blanking were analyzed by finite element (FE) method in dependency of defined positioning and process errors and evaluated concerning tool stresses and sheared edge quality.