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Technical Brief

A Microresonant Gas Sensor by Micro-Electroforming

[+] Author and Article Information
Lizhong Xu

Mechanical Engineering Institute,
Yanshan University,
Qinhuangdao 066004, China
e-mail: xlz@ysu.edu.cn

Yulei Liu

Mechanical Engineering Institute,
Yanshan University,
Qinhuangdao 066004, China
e-mail: liuyulei@ysu.edu.cn

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received April 7, 2015; final manuscript received September 28, 2015; published online October 23, 2015. Assoc. Editor: Nicholas Fang.

J. Micro Nano-Manuf 4(1), 014501 (Oct 23, 2015) (4 pages) Paper No: JMNM-15-1019; doi: 10.1115/1.4031740 History: Received April 07, 2015; Revised September 28, 2015

The microsensors are mainly made with the single crystal silicon which requires expensive equipments and complicated process. Here, the micro-electroforming technology is used to fabricate the microresonant gas sensor. The fabricating process of the microresonant gas sensor is proposed. A microcantilever beam resonator 900 μm long, 300 μm wide, and 10 μm thick is fabricated. The resonant frequency shift is measured when exposed to ethanol vapor. Results show that the shift in the resonant frequency is approximately proportional to the ethanol vapor concentration, and the detection accuracy to ethanol vapor with the sensor is about 1 ppm per Hz frequency shift.

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References

Lavrik, N. , 2004, “ Cantilever Transducers as a Platform for Chemical and Biological Sensors,” Rev. Sci. Instrum., 75(7), pp. 2229–2253. [CrossRef]
Gerhard, M. , Sebastian, B. , and Sumit, P. , 2011, “ Novel Chemical Sensor Applications in Commercial Aircraft,” 25th Eurosensors Conference, Vol. 25, Athens, Greece, pp. 16–22.
Michihiro, H. , Tomoko, T. , and Hajime, S. , 2002, “ Real-Time Analysis of Ligand-Induced Cell Surface and Intracellular Reactions of Living Mast Cells Using a Surface Plasmon Resonance-Based Biosensor,” Anal. Biochem., 302(1), pp. 28–37. [CrossRef] [PubMed]
Ikehara, T. , Lu, J. , Konno, M. , Maeda, R. , and Mihara, T. , 2007, “ A High Quality-Factor Silicon Cantilever for a Low Detection-Limit Resonant Mass Sensor Operated in Air,” J. Micromech. Microeng., 17(12), pp. 2491–2494. [CrossRef]
Manzaneque, T. , Hernando-Garcia, J. , and Ababneh, A. , 2011, “ Quality-Factor Amplification in Piezoelectric MEMS Resonators Applying an All-Electrical Feedback Loop,” J. Micromech. Microeng., 21(2), p. 025007. [CrossRef]
Manzaneque, T. , Hernando-Garcia, J. , and Ababneh, A. , 2010, “ Quality Factor Enhancement in AlN-Actuated MEMS by Velocity Feedback Loop,” 24th Eurosensors Conference, Vol. 5, Linz, Austria, pp. 1494–1497.
Ren, S. , Yuan, W. , and Qiao, D. , 2003, “ A Micromachined Pressure Sensor With Integrated Resonator Operating at Atmospheric Pressure,” Sensors, 13(12), pp. 17006–17024. [CrossRef]
Xu, L. , and Chang, W. , 2012, “ Sensitivity for a Micro Resonant Beam Pressure Sensor With Docks,” Proc. Inst. Mech. Eng., Part C, 227(4), pp. 852–861. [CrossRef]
Li, Q. , Fan, S. , and Tang, Z. , 2012, “ Non-Linear Dynamics of an Electrothermally Excited Resonant Pressure Sensor,” Sens. Actuators A, 188, pp. 19–28. [CrossRef]
Fadel, L. , Lochen, F. , and Dufour, I. , 2004, “ Chemical Sensing: Millimeter size Resonant Microcantilever Performance,” J. Micromech. Microeng., 14(9), pp. 23–30. [CrossRef]
Thomas, B. , Murali, K. , and Natalija, B. , 2009, “ Quantitative Time-Resolved Measurement of Membrane Protein–Ligand Interactions Using Microcantilever Array Sensors,” Nat. Nanotechnol., 4(3), pp. 179–185. [CrossRef] [PubMed]
Tao, Y. , Li, X. , and Xu, T. , 2011, “ Resonant Cantilever Sensors Operated in a High-Q In-Plane Mode for Real-Time Bio/Chemical Detection in Liquids,” Sens. Actuators B, 157(2), pp. 606–614. [CrossRef]
Ozturk, A. , Ocakli, H. I. , Ozber, N. , Urey, H. , Kavakli, I. H. , and Alaca, B. E. , 2008, “ A Magnetically Actuated Resonant Mass Sensor With Integrated Optical Readout,” IEEE Photonic Technol. Lett., 20(23), pp. 1905–1907. [CrossRef]
Erman, T. , Erdem, A. B. , Halil, K. I. , and Hakan, U. , 2011, “ MEMS Biosensor for Detection of Hepatitis A and C Viruses in Serum,” Biosens. Bioelectron., 28(1), pp. 189–194. [CrossRef] [PubMed]
Jin, H. , Harvey, E. C. , Hayes, J. P. , Ghantasala, M. K. , Fu, Y. , and Jolic, K. , 2002, “ Laser-LIGA for Ni microcantilevers,” Proc. SPIE, 4935, pp. 263–271.

Figures

Grahic Jump Location
Fig. 1

Fabricating process of the microresonant gas sensor

Grahic Jump Location
Fig. 2

Microcantilever beam and cathode units on composite plate: (a) Cathode units on composite plate, (b) microcantilever beam, and (c) microprecision carving machine

Grahic Jump Location
Fig. 3

Test system and the open loop test results: (a) Test system and (b) open-loop test results

Grahic Jump Location
Fig. 4

Resonant frequency shift when exposed to ethanol vapor: (a) Real-time resonant frequency and (b) frequency shift

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