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Research Papers

Design of a High Bandwidth Nonresonant Tertiary Motion Generator for Elliptical Vibration Texturing

[+] Author and Article Information
Keyu Chen, Chang Si

Department of Mechanical and
Automation Engineering,
The Chinese University of Hong Kong,
Hong Kong, China

Ping Guo

Mem. ASME
Department of Mechanical and
Automation Engineering,
The Chinese University of Hong Kong,
Hong Kong, China
e-mail: pguo@mae.cuhk.edu.hk

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received November 24, 2016; final manuscript received November 28, 2016; published online January 10, 2017. Editor: Jian Cao.

J. Micro Nano-Manuf 5(1), 011008 (Jan 10, 2017) (7 pages) Paper No: JMNM-16-1067; doi: 10.1115/1.4035473 History: Received November 24, 2016; Revised November 28, 2016

This paper presents the design and characteristics of a new two-dimensional nonresonant tertiary motion generator which is based on the flextensional structure. A tool holder connects two perpendicularly placed flextensional actuators with flexure hinges which decouple the motion outputs from the two actuators. Piezoelectric stacks, which are preloaded through precision screws, are used to provide input displacements. By balancing the requirements of driving current, stiffness, and the displacement amplification ratio, the proposed design is targeted to operate at above 10 kHz with two-dimensional vibrations amplitude of 10 μm in each direction. Technical difficulties in driving a nonresonant mode piezoelectric actuator at a high frequency are discussed. The solutions and optimization procedures are presented in this paper. The design is optimized by finite-element simulation; and the results are presented and verified by our prototype design.

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Figures

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Fig. 1

Effects of dimple geometry on the hydrodynamic lifting effect

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Fig. 2

Flextensional structure designs: (a) schematic of a flextensional amplifier mechanism and (b) proposed design of a flextensional amplifier

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Fig. 3

Design of the nonresonant elliptical TMG: (a) CAD model and (b) schematic of the flexure hinge design

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Fig. 4

Modal analysis results: mode shapes of (a) the flextensional frame and (b) the TMG design

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Fig. 5

Model description of the static tests

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Fig. 6

Displacement outputs without load: (a) and (b) symmetric inputs; (c) and (d) antisymmetric inputs. (a) DOC displacement, (b) parasite motion (cutting), (c) cutting displacement, and (d) parasite motion (DOC).

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Fig. 7

Displacement outputs with a 10 N load: (a) and (b) symmetric inputs; (c) and (d) antisymmetric inputs. (a) DOC displacement, (b) parasite motion (cutting), (c) cutting displacement, and (d) parasite motion (DOC).

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Fig. 8

Frequency response in the DOC and cutting directions: (a) with symmetric inputs and (b) with antisymmetric inputs

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Fig. 9

Simulation with the assembled conditions: (a) model description and simulated elliptical vibration trajectory with (b) 90 deg phase angle, (c) 0 deg phase angle, and (d) 180 deg phase angle

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Fig. 10

Experimental setup

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Fig. 11

Elliptical tool trajectories for different phase inputs: (a) at 5 Hz and (b) at 2 kHz

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Fig. 12

Triangular tool trajectories under nonharmonic inputs

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