Research Papers

Design of a High Bandwidth Nonresonant Tertiary Motion Generator for Elliptical Vibration Texturing

[+] Author and Article Information
Keyu Chen, Chang Si

Department of Mechanical and
Automation Engineering,
The Chinese University of Hong Kong,
Hong Kong, China

Ping Guo

Department of Mechanical and
Automation Engineering,
The Chinese University of Hong Kong,
Hong Kong, China
e-mail: pguo@mae.cuhk.edu.hk

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received November 24, 2016; final manuscript received November 28, 2016; published online January 10, 2017. Editor: Jian Cao.

J. Micro Nano-Manuf 5(1), 011008 (Jan 10, 2017) (7 pages) Paper No: JMNM-16-1067; doi: 10.1115/1.4035473 History: Received November 24, 2016; Revised November 28, 2016

This paper presents the design and characteristics of a new two-dimensional nonresonant tertiary motion generator which is based on the flextensional structure. A tool holder connects two perpendicularly placed flextensional actuators with flexure hinges which decouple the motion outputs from the two actuators. Piezoelectric stacks, which are preloaded through precision screws, are used to provide input displacements. By balancing the requirements of driving current, stiffness, and the displacement amplification ratio, the proposed design is targeted to operate at above 10 kHz with two-dimensional vibrations amplitude of 10 μm in each direction. Technical difficulties in driving a nonresonant mode piezoelectric actuator at a high frequency are discussed. The solutions and optimization procedures are presented in this paper. The design is optimized by finite-element simulation; and the results are presented and verified by our prototype design.

Copyright © 2017 by ASME
Your Session has timed out. Please sign back in to continue.


Guo, P. , and Ehmann, K. F. , 2013, “ An Analysis of the Surface Generation Mechanics of the Elliptical Vibration Texturing Process,” Int. J. Mach. Tools Manuf., 64, pp. 85–95. [CrossRef]
Guo, P. , Lu, Y. , Pei, P. , and Ehmann, K. F. , 2014, “ Fast Generation of Micro-Channels on Cylindrical Surfaces by Elliptical Vibration Texturing,” ASME J. Manuf. Sci. Eng., 136(4), p. 041008. [CrossRef]
Guo, P. , Lu, Y. , Ehmann, K. F. , and Cao, J. , 2014, “ Generation of Hierarchical Micro-Structures for Anisotropic Wetting by Elliptical Vibration Cutting,” CIRP Ann.-Manuf. Technol., 63(1), pp. 553–556. [CrossRef]
Guo, P. , and Ehmann, K. F. , 2013, “ Development of a Tertiary Motion Generator for Elliptical Vibration Texturing,” Precis. Eng., 37(2), pp. 364–371. [CrossRef]
Suzuki, N. , Yokoi, H. , and Shamoto, E. , 2011, “ Micro/Nano Sculpturing of Hardened Steel by Controlling Vibration Amplitude in Elliptical Vibration Cutting,” Precis. Eng., 35(1), pp. 44–50. [CrossRef]
Nanbu, T. , Ren, N. , Yasuda, Y. , Zhu, D. , and Wang, Q. J. , 2008, “ Micro-Textures in Concentrated Conformal-Contact Lubrication: Effects of Texture Bottom Shape and Surface Relative Motion,” Tribol. Lett., 29(3), pp. 241–252. [CrossRef]
Ahn, J.-H. , Lim, H.-S. , and Son, S.-M. , “ Improvement of Micro-Machining Accuracy by 2-Dimensional Vibration Cutting,” American Society of Precision Engineering, pp. 150–153.
Cerniway, M. A. , 2002, “ Elliptical Diamond Milling: Kinematics, Force and Tool Wear,” M.S. thesis, North Carolina State University, Raleigh, NC.
Negishi, N. , 2003, “ Elliptical Vibration Assisted Machining With Single Crystal Diamond Tools,” M.S. thesis, North Carolina State University, Raleigh, NC.
Heamawatanachai, S. , and Bamberg, E. , 2009, “ Design and Characterization of a PZT Driven Micromachining Tool Based on Single-Point Tool Tip Geometry,” Precis. Eng., 33(4), pp. 387–394. [CrossRef]
Liu, J. , O'Connor, W. J. , Ahearne, E. , and Byrne, G. , 2014, “ Electromechanical Modelling for Piezoelectric Flextensional Actuators,” Smart Mater. Struct., 23(2), p. 025005. [CrossRef]
Sun, C.-L. , Guo, S. , Li, W. , Xing, Z. , Liu, G. , and Zhao, X.-Z. , 2005, “ Displacement Amplification and Resonance Characteristics of the Cymbal Transducers,” Sens. Actuators A, 121(1), pp. 213–220. [CrossRef]
Meyer, R. , Dogan, A. , Yoon, C. , Pilgrim, S. , and Newnham, R. , 2001, “ Displacement Amplification of Electroactive Materials Using the Cymbal Flextensional Transducer,” Sens. Actuators A, 87(3), pp. 157–162. [CrossRef]


Grahic Jump Location
Fig. 1

Effects of dimple geometry on the hydrodynamic lifting effect

Grahic Jump Location
Fig. 2

Flextensional structure designs: (a) schematic of a flextensional amplifier mechanism and (b) proposed design of a flextensional amplifier

Grahic Jump Location
Fig. 3

Design of the nonresonant elliptical TMG: (a) CAD model and (b) schematic of the flexure hinge design

Grahic Jump Location
Fig. 9

Simulation with the assembled conditions: (a) model description and simulated elliptical vibration trajectory with (b) 90 deg phase angle, (c) 0 deg phase angle, and (d) 180 deg phase angle

Grahic Jump Location
Fig. 8

Frequency response in the DOC and cutting directions: (a) with symmetric inputs and (b) with antisymmetric inputs

Grahic Jump Location
Fig. 7

Displacement outputs with a 10 N load: (a) and (b) symmetric inputs; (c) and (d) antisymmetric inputs. (a) DOC displacement, (b) parasite motion (cutting), (c) cutting displacement, and (d) parasite motion (DOC).

Grahic Jump Location
Fig. 6

Displacement outputs without load: (a) and (b) symmetric inputs; (c) and (d) antisymmetric inputs. (a) DOC displacement, (b) parasite motion (cutting), (c) cutting displacement, and (d) parasite motion (DOC).

Grahic Jump Location
Fig. 5

Model description of the static tests

Grahic Jump Location
Fig. 4

Modal analysis results: mode shapes of (a) the flextensional frame and (b) the TMG design

Grahic Jump Location
Fig. 10

Experimental setup

Grahic Jump Location
Fig. 11

Elliptical tool trajectories for different phase inputs: (a) at 5 Hz and (b) at 2 kHz

Grahic Jump Location
Fig. 12

Triangular tool trajectories under nonharmonic inputs



Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In