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research-article

Material dependence of the contact behaviour of oscillating microprobes - modelling and experimental evidence

[+] Author and Article Information
Sebastian Bohm

Technical Physics 1 Group, Technische Universität Ilmenau, Germany, IMN MacroNano® Technische Universität Ilmenau, IMN MacroNano®, Max-Planck-Ring 12, 98693 Ilmenau, Germany
sebastian.bohm@tu-ilmenau.de

Boris Goj

Micromechanical Systems Group, Technische Universität Ilmenau, Germany, IMN MacroNano® Technische Universität Ilmenau, IMN MacroNano®, Max-Planck-Ring 12, 98693 Ilmenau, Germany
boris.goj@tu-ilmenau.de

Lars Dittrich

Micromechanical Systems Group, Technische Universität Ilmenau, Germany, IMN MacroNano® Technische Universität Ilmenau, IMN MacroNano®, Max-Planck-Ring 12, 98693 Ilmenau, Germany
lars.dittrich@tu-ilmenau.de

Lothar Dressler

Micromechanical Systems Group, Technische Universität Ilmenau, Germany, IMN MacroNano® Technische Universität Ilmenau, IMN MacroNano®, Max-Planck-Ring 12, 98693 Ilmenau, Germany
lothar.dressler@tu-ilmenau.de

Martin Hoffmann

Micromechanical Systems Group, Technische Universität Ilmenau, Germany, IMN MacroNano® Technische Universität Ilmenau, IMN MacroNano®, Max-Planck-Ring 12, 98693 Ilmenau, Germany
martin.hoffmann@tu-ilmenau.de

1Corresponding author.

ASME doi:10.1115/1.4035619 History: Received September 16, 2016; Revised December 13, 2016

Abstract

Oscillating microprobes avoid high stress and the sticking effect during contact between micro-probe and measured surface. The full performance and application scope of oscillating microprobes can be explored and utilized once the reliable prediction of the microprobe contact behaviour is understood. Here, an improved contact model considering adhesion forces, surface roughness and viscoelastic damping for oscillating microprobes is presented and it is validated by exemplary meas-urements utilizing a uniaxially oscillating electrostatic microprobe. These results show that the non-destructive identification of material classes seems to be feasible by evaluating the phase shift be-tween the sinusoidal signals of sensor and actuator, respectively.

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