Research Papers

A Prediction Model for Ablation Fluence Threshold in Femtosecond Laser Processing of Fused Silica

[+] Author and Article Information
Han Wang

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China

Hong Shen

School of Mechanical Engineering,
Shanghai Jiao Tong University;
State Key Laboratory of Mechanical System
and Vibration,
Shanghai 200240, China
e-mail: sh_0320@sjtu.edu.cn

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received January 16, 2017; final manuscript received May 17, 2017; published online June 9, 2017. Assoc. Editor: Nicholas Fang.

J. Micro Nano-Manuf 5(3), 031006 (Jun 09, 2017) (8 pages) Paper No: JMNM-17-1003; doi: 10.1115/1.4036890 History: Received January 16, 2017; Revised May 17, 2017

The manufacture of micro–nano structures in transparent dielectrics is becoming increasingly important due to the applications in medical and biological sciences. The femtosecond pulsed laser, with its selectivity, high precision, and three-dimensional direct writing nature, is an ideal tool for this processing technology. In this paper, an improved model for the prediction of ablation crater shape and fluence threshold in femtosecond laser processing of fused silica is presented, in which self-trapping excitons and electrons' relaxation are involved to depict ionization process, Thornber's and Keldysh's models are employed to estimate ionization rate precisely, and a novel ablation criterion is proposed to judge ablation. Moreover, the relationship between the ablation fluence threshold and laser pulse duration is investigated with three different extrapolation methods. The results indicate that no matter which extrapolation method is employed, the ablation fluence thresholds predicted by the presented model agree with the published data.

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Fig. 1

A brief summary of femtosecond pulsed laser ablation

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Fig. 2

Basic physical processes involved in this model

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Fig. 3

Geometrical model in the simulation

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Fig. 4

The structure of simulating program: (a) main loop, (b) function P = g(V,t), and (c) function K = f(V,P)

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Fig. 5

Ablated zone for different laser fluences: (a) tp = 100 fs, (b) tp = 220 fs, (c) tp = 600 fs, and (d) tp = 1000 fs

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Fig. 6

The comparison between models with/without STE: (a) the developing curves of electrons' density and (b) the ablation areas

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Fig. 7

Prediction of ablation fluence threshold: (a) ablated volume, (b) ablated diameter, and (c) maximum ablated depth

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Fig. 8

Comparison between experimental data and ablation fluence thresholds



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