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research-article

Fabrication of TiO2 Thin Film Based Fresnel Zone Plates by Nanosecond Laser Direct Writing

[+] Author and Article Information
Tahseen Jwad

University of Birmingham School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
taj355@bham.ac.uk

Sunan Deng

Ecole Polytechnique Fédérale de Lausanne, Laboratory of Applied Photonics Devices, CH-1015 Lausanne, Switzerland
susan1988sgy@gmail.com

Haider Butt

University of Birmingham School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
H.Butt@bham.ac.uk

Stefan Dimov

University of Birmingham School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham B15 2TT, UK
s.s.dimov@bham.ac.uk

1Corresponding author.

ASME doi:10.1115/1.4038097 History: Received April 01, 2017; Revised September 27, 2017

Abstract

Fresnel zone plates (FZPs) have been gaining a significant attention by industry due to their compact design and light weight. Different fabrication methods have been reported and used for their manufacture but they are relatively expensive. This research proposes a new low-cost one-step fabrication method that utilises nanosecond laser selective oxidation of titanium coatings on glass substrates and thus to form TiO2 nano-scale films with different thicknesses by controlling the laser fluence and the scanning speed. In this way phase-shifting FZPs was manufactured where the TiO2 thin-films acted as a phase shifter for the reflected light while the gain in phase depended on the film thickness. A model was created to analyse the performance of such FZPs based on the scalar theory. Finally, phase-shifting FZPs were fabricated for different operating wavelengths by varying the film thickness and a measurement setup was built to compare experimental and theoretical results. A good agreement between these results was achieved and an FZP efficiency of 5.5% to 20.9% was obtained when varying the wavelength and the oxide thicknesses of the zones.

Copyright (c) 2017 by ASME
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