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Research Papers

Patterned Microstructure Array Fabrication by Using a Novel Standing Surface Acoustic Wave Device

[+] Author and Article Information
Yancheng Wang

Mem. ASME
State Key Laboratory of Fluid Power
and Mechatronic Systems,
Key Laboratory of Advanced Manufacturing
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: yanchwang@zju.edu.cn

Dai Xue

Key Laboratory of Advanced Manufacturing
Technology of Zhejiang Province,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: xuedai@zju.edu.cn

Deqing Mei

State Key Laboratory of Fluid Power
and Mechatronic Systems,
School of Mechanical Engineering,
Zhejiang University,
Hangzhou 310027, Zhejiang, China
e-mail: meidq_127@zju.edu.cn

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received September 19, 2017; final manuscript received November 20, 2017; published online December 26, 2017. Editor: Jian Cao.

J. Micro Nano-Manuf 6(2), 021002 (Dec 26, 2017) (7 pages) Paper No: JMNM-17-1057; doi: 10.1115/1.4038675 History: Received September 19, 2017; Revised November 20, 2017

This paper develops a novel standing surface acoustic wave (SAW) device with three pairs of interdigital transducers (IDTs) to fabricate the patterned microstructure arrays with the assistance of ultraviolet (UV) polymerization. The working principle, structural design, and fabrication of the SAW device are presented. Then, experimental setup was conducted to investigate the fabrication process and method of the patterned microstructure arrays on a thin photosensitive polymer surface. By adjusting the working wavelength and input voltage and selecting the pairs of IDTs, several types of patterned microstructure arrays, such as linear and latticed undulate with different surface morphologies, could be fabricated. For the application of the microstructure arrays, L929 mouse fibroblasts are cultured on the surface with linear undulate microstructure arrays. Preliminary results showed that the cells aligned well with the direction of the patterned surface and the array can enhance the cell culturing. Therefore, using the developed SAW device with the assistance of UV polymerization is an effective method to fabricate the patterned microstructure arrays, which may have great potential in the applications of biomedical and/or microelectronic fields.

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Figures

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Fig. 1

(a) Standing SAW generated on the LiNO3 substrate and (b) interaction of standing SAW with polymer film excites ordered patterns

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Fig. 2

(a) Isometric view of the designed SAW device and (b) three pairs of IDTs

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Fig. 3

(a) Fabrication process of the IDTs; (b) fabricated three pairs of IDTs on the LiNO3 substrate; and (c) photograph of the SAW device

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Fig. 4

Experimental setup

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Fig. 5

Four-step procedure to fabricate patterned microstructure arrays

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Fig. 6

Fabricated and measured results of linear undulate microstructure arrays (the scale bar is 100 μm, the unit of each axes is μm)

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Fig. 7

Amplitude of fabricated array under different input voltage. The error bars represent standard deviation.

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Fig. 8

Fabricated and measured results of 2D latticed microstructure arrays (the scale bar is 100 μm, the unit of each axes is μm)

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Fig. 9

The patterned microstructure arrays fabricated by three pairs of IDTs: (a) A-A′ and B-B′ and C-C′ IDTs simultaneously and (b) A-A′ IDT has 90 deg phase shit with that of B-B′ and C-C′ IDTs (the scale bar is 100 μm, the unit of each axes is μm)

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Fig. 10

Cell culturing: on the flat surface after (a) 1 h and (c) 24 h, on the patterned surface after (b) 1 h and (d) 24 h

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