Fabrication of micro DLC-nozzles by plasma oxidation printing

[+] Author and Article Information
Tatsuhiko Aizawa

Shibaura Institute of Technology, 3-9-14 Shibaura, Minato-City, Tokyo 108-8548, Japan

Hiroshi Tamagaki

KOBELCO, Co. Ltd., 5-15, Kitashinagawa 5-chome, Shinagawa-ku, Tokyo 141-8626, Japan

Kenji Wasa

TECDIA, Co., Ltd., 4-3-4 Shibaura, Minato-City, Tokyo 108-0023, Japan

1Corresponding author.

ASME doi:10.1115/1.4039358 History: Received December 13, 2016; Revised January 16, 2018


The plasma oxidation printing was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micro-nozzle on the tool steel substrate. Its head shape was first designed by CAD (Computer Aided Design) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 ?m and the height of 10 ?m was fabricated during the duration time of 3.6 ks. Different from the micro-milling or the micro electric discharging, the micro-nozzle geometry is directly fabricated from its CAD data. The micro-nozzle with the cross-star outlet was constructed without change of processing procedure and without use of tooling.

Copyright (c) 2018 by ASME
Your Session has timed out. Please sign back in to continue.






Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In