Research Papers

Fabrication of Micro Diamond-Like Carbon-Nozzles by Plasma Oxidation Printing

[+] Author and Article Information
Tatsuhiko Aizawa

College of Engineering and Design,
Shibaura Institute of Technology,
3-9-14 Shibaura,
Minato-City 108-8548, Tokyo, Japan
e-mail: taizawa@sic.shibaura-it.ac.jp

Hiroshi Tamagaki

KOBELCO, Co. Ltd.,
5-15, Kitashinagawa 5-chome,
Shinagawa-ku 141-8626, Tokyo, Japan
e-mail: tamagaki.hiroshi@kobelco.com

Kenji Wasa

TECDIA, Co., Ltd.,
4-3-4 Shibaura,
Minato-City 108-0023, Tokyo, Japan
e-mail: k_wasa@tecdia.co.jp

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO-AND NANO-MANUFACTURING. Manuscript received December 13, 2016; final manuscript received January 16, 2018; published online March 30, 2018. Assoc. Editor: Takashi Matsumura.

J. Micro Nano-Manuf 6(2), 021007 (Mar 30, 2018) (6 pages) Paper No: JMNM-16-1070; doi: 10.1115/1.4039358 History: Received December 13, 2016; Revised January 16, 2018

The plasma oxidation printing (POP) was proposed as a digital manufacturing to shape the diamond-like carbon (DLC) thick film into a micronozzle on the tool steel substrate. Its head shape was first designed by computer-aided design (CAD) and printed onto DLC film by the maskless lithography. The unprinted DLC was removed in depth by the anisotropic etching. Fine circular nozzle with the inner diameter of 10 μm and the height of 10 μm was fabricated during the duration time of 3.6 ks. Different from the micromilling or the micro-electric discharging, the micronozzle geometry is directly fabricated from its CAD data. The micronozzle with the cross-star outlet was constructed without the change of processing procedure and without use of tooling.

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Fig. 1

Illustration on the POP: (a) two-dimensional design of nozzles by CAD, (b) Maskless lithography to print this CAD-geometry onto the DLC film, and (c) plasma oxidation to fabricate the DLC-nozzles

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Fig. 2

The cross-sectional SEM image of the DLC film deposited by PECVD for 9.72 ks

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Fig. 3

Two-dimensional solid circle patterns drawn onto the DLC coating by the maskless patterning

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Fig. 4

In situ measured EOS during the plasma oxidation process: (a) wide scanned spectrum, (b) narrow scanned spectrum, and (c) time history of detected CO-peak during the etching process

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Fig. 5

Construction of circular pillar assembly by the POP

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Fig. 6

A circular ring initially drawn by the maskless patterning with the outer diameter of 20 μm and the inner diameter of 10 μm

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Fig. 7

Construction of a micro-DLC-nozzle with the circular outlet by the present POP method

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Fig. 8

A cross-star shaped micropattern on the bare DLC film coated onto the tool steel

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Fig. 9

Construction of a micro-DLC-nozzle with the cross-star shaped outlet by the POP method

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Fig. 10

A part of DLC nozzle array with designed outlet geometries formed on the SKD11 substrate by removing the unprinted residual DLC films



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