0
Technical Brief

Experiment-Based Quantitative Analysis of Picosecond Pulse-Induced Morphological Changes in Fused Silica

[+] Author and Article Information
Jingwen Yan, Han Wang

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China

Hong Shen

School of Mechanical Engineering,
Shanghai Jiao Tong University,
Shanghai 200240, China;
State Key Laboratory of Mechanical System and Vibration,
Shanghai 200240, China
e-mail: sh_0320@sjtu.edu.cn

1Corresponding author.

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO-AND NANO-MANUFACTURING. Manuscript received June 14, 2018; final manuscript received August 22, 2018; published online October 10, 2018. Assoc. Editor: Cheryl Xu.

J. Micro Nano-Manuf 6(4), 044501 (Oct 10, 2018) (5 pages) Paper No: JMNM-18-1020; doi: 10.1115/1.4041509 History: Received June 14, 2018; Revised August 22, 2018

Due to its excellent quality, fused silica has been widely used in various industrial applications. The nonlinear absorptive nature of ultrafast laser pulses enables the induction of morphological changes within the bulk transparent materials. In this study, the interior modification of fused silica is induced by a picosecond pulsed laser, and the relationship between processing parameters and the modification geometry is demonstrated. Three different patterns are identified according to the geometric characteristics of the modification. Furthermore, a simple experiment-based model considering the incubation effect is put forward to predict picosecond pulse-induced morphological changes in fused silica.

FIGURES IN THIS ARTICLE
<>
Copyright © 2018 by ASME
Your Session has timed out. Please sign back in to continue.

References

Zhou, Y. , 2008, Microjoining and Nanojoining, CRC Press, Boca Raton, FL.
Tong, L. , and Soutis, C. , 2003, Recent Advances in Structural Joints and Repairs for Composite Materials, Springer, Dordrecht, The Netherlands.
Alexe, M. , and Gösele, U. , 2004, Wafer Bonding, Springer, Berlin.
Chaminade, C. , Olowinsky, A. , and Kind, H. , 2007, “ Laser-Based Glass Soldering for MEMS Packaging,” 26th International Congress on Application of Lasers and Electro-Optics (ICALEO), Orlando, FL, Oct. 29–Nov. 1, pp. 143–148.
Shimbo, M. , Furukawa, K. , Fukuda, K. , and Tanzawa, K. , 1986, “ Silicon-to-Silicon Direct Bonding Method,” J. Appl. Phys., 60(8), pp. 2987–2989. [CrossRef]
Stuart, B. C. , Feit, M. D. , Herman, S. , Rubenchik, A. M. , Shore, B. W. , and Perry, M. D. , 1996, “ Nanosecond-to-Femtosecond Laser-Induced Breakdown in Dielectrics,” Phys. Rev. B, 53(4), pp. 1749–1761. [CrossRef]
Schaffer, C. B. , Jamison, A. O. , and Mazur, E. , 2004, “ Morphology of Femtosecond Laser-Induced Structural Changes in Bulk Transparent Materials,” Appl. Phys. Lett., 84(9), pp. 1441–1443. [CrossRef]
Horn, A. , 2008, “ Investigations on Melting and Welding of Glass by Ultra-Short Laser Radiation,” J. Laser Micro/Nanoeng., 3(2), pp. 114–118. [CrossRef]
Hélie, D. , 2012, “ Reinforcing a Direct Bond Between Optical Materials by Filamentation Based Femtosecond Laser Welding,” J. Laser Micro/Nanoeng., 7(3), pp. 284–292. [CrossRef]
Chen, J. , Carter, R. M. , Thomson, R. R. , and Hand, D. P. , 2015, “ Avoiding the Requirement for Pre-Existing Optical Contact During Picosecond Laser Glass-to-Glass Welding,” Opt. Express, 23(21), pp. 18645–18657. [CrossRef] [PubMed]
Miyamoto, I. , Cvecek, K. , and Schmidt, M. , 2012, “ Evaluation of Nonlinear Absorptivity in Internal Modification of Bulk Glass by Ultrashort Laser Pulses,” Opt. Express, 19(11), pp. 10714–10727. [CrossRef]
Miyamoto, I. , Cvecek, K. , and Schmidt, M. , 2013, “ Crack-Free Conditions in Welding of Glass by Ultrashort Laser Pulse,” Opt. Express, 21(12), pp. 14291–14302. [CrossRef] [PubMed]
Takekuni, T. , Okamoto, Y. , Fujiwara, T. , Okada, A. , and Miyamoto, I. , 2015, “ Effects of Focusing Condition on Micro-Welding Characteristics of Borosilicate Glass by Picosecond Pulsed Laser,” Key Eng. Mater., 656–657, pp. 461–467. [CrossRef]
Huang, H. , Yang, L. M. , and Liu, J. , 2012, “ Ultrashort Pulsed Fiber Laser Welding and Sealing of Transparent Materials,” Appl. Opt., 51(15), pp. 2979–2986. [CrossRef] [PubMed]
Miyamoto, I. , Horn, A. , and Gottmann, J. , 2007, “ Local Melting of Glass Material and Its Application to Direct Fusion Welding by Ps-Laser Pulses,” J. Laser Micro/Nanoeng., 2(1), pp. 7–14. [CrossRef]
Richter, S. , Doring, S. , Zimmermann, F. , Lescieux, L. , Eberhardt, R. , Nolte, S. , and Tunnermann, A. , 2012, “ Welding of Transparent Materials With Ultrashort Laser Pulses,” Proc. SPIE, 8244, p. 824402.
Miyamoto, I. , Cvecek, K. , Okamoto, Y. , and Schmidt, M. , 2014, “ Internal Modification of Glass by Ultrashort Laser Pulse and Its Application to Microwelding,” Appl. Phys. A, 114(1), pp. 187–208. [CrossRef]
Becker, M. F. , Walser, R. M. , and Yong, J. , 1988, “ Laser-Induced Damage on Single-Crystal Metal Surfaces,” J. Opt. Soc. Am. B, 5(3), pp. 648–659. [CrossRef]
Cheng, J. , Liu, C. S. , Shang, S. , Liu, D. , Perrie, W. , Dearden, G. , and Watkins, K. , 2013, “ A Review of Ultrafast Laser Materials Micromachining,” Opt. Laser Technol., 46(1), pp. 88–102. [CrossRef]
Rosenfeld, A. , Lorenz, M. , Stoian, R. , and Ashkenasi, D. , 1999, “ Ultrashort-Laser-Pulse Damage Threshold of Transparent Materials and the Role of Incubation,” Appl. Phys. A, 69(7), pp. S373–S376. [CrossRef]

Figures

Grahic Jump Location
Fig. 1

Glass processing by picosecond pulse laser

Grahic Jump Location
Fig. 2

Modified feature (57.1 μJ, 20 mm/s)

Grahic Jump Location
Fig. 3

Evolution of plasma in fused silica

Grahic Jump Location
Fig. 4

The cross section modified feature at different pulse energies (v = 100 mm/s)

Grahic Jump Location
Fig. 5

The length and width of modified feature at different pulse energy (v = 100 mm/s)

Grahic Jump Location
Fig. 6

The cross section modified feature at different scanning velocities (E = 57.1 μJ)

Grahic Jump Location
Fig. 7

The length and width of modified feature at different scanning velocities (E = 57.1 μJ)

Grahic Jump Location
Fig. 8

Three patterns of modified feature in glass

Grahic Jump Location
Fig. 9

Schematic diagram of ωd and ωl

Grahic Jump Location
Fig. 10

Layout of three different patterns for the modification feature

Tables

Errata

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging and repositioning the boxes below.

Related Journal Articles
Related eBook Content
Topic Collections

Sorry! You do not have access to this content. For assistance or to subscribe, please contact us:

  • TELEPHONE: 1-800-843-2763 (Toll-free in the USA)
  • EMAIL: asmedigitalcollection@asme.org
Sign In