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Special Section Papers

Influence of the Planetary Movement of Tool on the Aspect Ratio of Micro Holes Machined by Micro-Ultrasonic Machining

[+] Author and Article Information
Senwang Lei, Kai Zhou, Jianzhong Li, Renke Kang

Key Laboratory for Precision and Non-Traditional
Machining Technology of Ministry of Education,
Dalian University of Technology,
Dalian 116024, China

Zuyuan Yu

Key Laboratory for Precision and Non-Traditional
Machining Technology of Ministry of Education,
Dalian University of Technology,
Dalian 116024, China
e-mail: zyu@dlut.edu.cn

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO-AND NANO-MANUFACTURING. Manuscript received November 18, 2018; final manuscript received March 2, 2019; published online April 11, 2019. Assoc. Editor: Lawrence Kulinsky.

J. Micro Nano-Manuf 7(1), 010905 (Apr 11, 2019) (7 pages) Paper No: JMNM-18-1056; doi: 10.1115/1.4043171 History: Received November 18, 2018; Revised March 02, 2019

The micro-ultrasonic machining (USM) is suitable for machining hard and brittle materials. When a micro hole is drilled deeply using micro-USM, machining speed slows down and the breakage of micro tool may occur. To solve this problem, this paper proposes the application the planetary movement of micro tool in high-aspect ratio micro holes drilling by micro-USM. The micro holes of about 92 μm in diameter with an aspect ratio larger than ten have been machined. The processing efficiency has been improved. The influence of planetary movement parameters on processing efficiency has been investigated

Copyright © 2019 by ASME
Topics: Machining
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References

Masuzawa, T. , 2000, “ State of the Art of Micromachining,” Ann. CIRP, 49(2), pp. 473–488. [CrossRef]
An, C. M. , Yin, G. Q. , Li, J. Z. , and Yu, Z. Y. , 2011, “ Study of Micro Hole, Hole Array and 3D Micro Cavity Machined by USM,” Electromach. Mould, 1, pp. 23–27 (in Chinese).
Tateishi, T. , Yoshihara, N. , Yan, J. , and Kuriyagawa, T. , 2009, “ Fabrication of High-Aspect Ratio Micro Holes on Hard Brittle materials-Study on Electrorheological Fluid-Assisted Micro Ultrasonic Machining,” Key Eng. Mater., 389–390, pp. 264–270.
Kumar, S. , and Dvivedi, A. , 2018, “ Fabrication of Microchannels Using Rotary Tool Micro-USM: An Experimental Investigation on Tool Wear Reduction and Form Accuracy Improvement,” J. Manuf. Processes, 32, pp. 802–815. [CrossRef]
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Schorderet, A. , Deghilage, E. , and Agbeviade, K. , 2013, “ Tool Type and Hole Diameter Influence in Deep Ultrasonic Drilling of Micro-Holes in Glass,” Procedia CIRP, 6, pp. 565–570. [CrossRef]
Lv, Z. W. , 2012, “ Numerical Simulation and Machining Parameter Optimization of Micro Hole Drilling Aided With Planetary Movement of Electrode by Micro EDM,” Master dissertation, Dalian University of Technology, Ganjingzi Qu, China (in Chinese).
Yu, Z. Y. , Zhang, Y. , Li, J. , Luan, J. , Zhao, F. , and Guo, D. , 2009, “ High Aspect Ratio Micro-Hole Drilling Aided With Ultrasonic Vibration and Planetary Movement of Electrode by Micro-EDM,” Ann. CIRP, 58(1), pp. 213–216. [CrossRef]
Masuzawa, T. , Fujino, M. , Kobayashi, K. , Suzuki, T. , and Kinoshita, N. , 1985, “ Wire Electrodischarge Grinding for Micro-Machining,” Ann. CIRP, 34(1), pp. 431–434. [CrossRef]
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Figures

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Fig. 1

Feeding depth versus machining time

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Fig. 2

Machining result of a high aspect ratio by conventional USM [3]

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Fig. 3

Machined high micro hole aspect ratio by electrorheological fluid-assisted USM [3]

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Fig. 4

The experimental device of micro-USM

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Fig. 5

Normal force signal curve of machining

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Fig. 6

Abnormal force signal curve of machining

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Fig. 7

Feed depth versus machining time (without planetary movement of tool)

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Fig. 8

Feeding depth versus machining time (with planetary movement of tool)

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Fig. 9

The hole with aspect ratio of 10.1 and the tool used after machining: (a) the machined hole and (b) the tool after machining

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Fig. 10

The aspect ratio of micro holes

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Fig. 11

Material removal rate

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Fig. 12

Material removal rate versus planetary movement speed (abrasive size = 1 μm)

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Fig. 13

Material removal rate versus planetary movement speed (abrasive size = 0.5 μm)

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Fig. 14

Relative wear rate of tool

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Fig. 15

Unilateral machining gap

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