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Technical Brief

Plasma printing of micro-nozzles with complex shaped outlets into stainless steel sheets

[+] Author and Article Information
Tatsuhiko Aizawa

Surface Engineering Design Laboratory, Shibaura Institute of Technology, 3-15-10 Minami-Rokugo, Ota-City, Tokyo 144-0045, Japan
taizawa@sic.shibaura-it.ac.jp

Keji Wasa

Research & Development Division, TecDia, Co. Ltd., 4-3-4 Shibaura, Minato-City, Tokyo 108-0023, Japan
wasa@mui.biglobe.ne.jp

1Corresponding author.

ASME doi:10.1115/1.4043958 History: Received November 11, 2018; Revised May 29, 2019

Abstract

The plasma printing was developed as a means to fabricate the micro-nozzle chip with the inner diameter less than 50 micro-meter. The initial two dimensional micro-pattern was printed onto the stainless steel substrate surface by the maskless lithography. These printed micro-patterns were utilized as a mask to make selective nitriding into the unprinted surface. After removal of printed pattern, the unnitrided surfaces were chemically etched to leave the nitrided micro-texture as a micro-nozzle chip. High nitrogen super-saturation as well as selective nitrogen diffusion had influence on the spatial resolution in this plasma printing in addition to the digital error in the maskless lithography.

Copyright (c) 2019 by ASME
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