Technical Brief

Plasma printing of micro-nozzles with complex shaped outlets into stainless steel sheets

[+] Author and Article Information
Tatsuhiko Aizawa

Surface Engineering Design Laboratory, Shibaura Institute of Technology, 3-15-10 Minami-Rokugo, Ota-City, Tokyo 144-0045, Japan

Keji Wasa

Research & Development Division, TecDia, Co. Ltd., 4-3-4 Shibaura, Minato-City, Tokyo 108-0023, Japan

1Corresponding author.

ASME doi:10.1115/1.4043958 History: Received November 11, 2018; Revised May 29, 2019


The plasma printing was developed as a means to fabricate the micro-nozzle chip with the inner diameter less than 50 micro-meter. The initial two dimensional micro-pattern was printed onto the stainless steel substrate surface by the maskless lithography. These printed micro-patterns were utilized as a mask to make selective nitriding into the unprinted surface. After removal of printed pattern, the unnitrided surfaces were chemically etched to leave the nitrided micro-texture as a micro-nozzle chip. High nitrogen super-saturation as well as selective nitrogen diffusion had influence on the spatial resolution in this plasma printing in addition to the digital error in the maskless lithography.

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