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research-article

Vertical Deployment of Multilayered Metallic Microstructures with High Area-to-Mass Ratios by Thermal Actuation

[+] Author and Article Information
Zhongjing Ren

Department of Mechanical Engineering, Stevens Institute of Technology, 1 Castle Point Terrace, Hoboken, NJ 07030, United States; School of Astronautics, Northwestern Polytechnical University, 127 Youyi Road, Xi'An, Shaanxi 710072, China
zren2@stevens.edu

Jianping Yuan

School of Astronautics, Northwestern Polytechnical University, 127 Youyi Road, Xi'An, Shaanxi 710072, China
jyuan@nwpu.edu.cn

Xiaoyu Su

School of Automation, Northwestern Polytechnical University, 127 Youyi Road, Xi'An, Shaanxi 710072, China
xsu2@stevens.edu

Hao Sun

School of Astronautics, Northwestern Polytechnical University, 127 Youyi Road, Xi'An, Shaanxi 710072, China
hsun9@stevens.edu

Richard Gaols

Department of Mechanical Engineering, Stevens Institute of Technology, 1 Castle Point Terrace, Hoboken, NJ 07030, United States
rickgalos@gamil.com

Yong Shi

Department of Mechanical Engineering, Stevens Institute of Technology, 1 Castle Point Terrace, Hoboken, NJ 07030, United States
yshi2@stevens.edu

Sundeep Mangla

Downstate Medical Center, State University of New York, 450 Clarkson Ave, Box 1189, Brooklyn, NY 11203-2098 United States
Sundeep.mangla@gmail.com

Ming Lu

Center for Functional Nanomaterials, Brookhaven National Laboratory, 98 Rochester St, Upton, NY 11973, United States
mlu@bnl.gov

Fernando Camino

Center for Functional Nanomaterials, Brookhaven National Laboratory, 98 Rochester St, Upton, NY 11973, United States
fcamino@bnl.gov

1Corresponding author.

ASME doi:10.1115/1.4043987 History: Received January 08, 2019; Revised June 04, 2019

Abstract

Lightweight Microstructures with high area-to-mass ratios, or low surface densities, show great potential applications in micro robots, soft electronic, medical devices and solar sailing. However, the bending stiffness of such microstructures is usually too low to work effectively. In order to obtain active microstructures with enhanced bending stiffness, a new design for thermally actuated multilayered metallic microstructures with high area-to-mass ratios is presented in this article. The microstructures made of aluminum and NiTi alloy are fabricated to demonstrate the feasibility of vertical deployment of such microstructures under thermal actuation. The concept design and working principle of designed multilayered metallic microstructures is based on symmetrical deposition of metals Al\NiTi\NiTi\Al, followed by practical microfabrication processes, such as photolithography, physical vapor deposition, dry etch, etc. The area-to-mass ratios of such microstructures could be up to 400 m2/kg. Then, experiments for electrical characterization are set up for thermal actuation or Joule heating. Besides that, the equivalent resistances of such microstructures with regard to temperatures are calibrated, allowing for the determination of in-situ temperatures of deformed microstructures when being heated in the vacuum chamber of SEM. Finally, vertical deployment of such thin microstructures is detected and measured, which validates the feasibility of stiffness enhancement through the symmetrical design and thermal actuation.

Copyright (c) 2019 by ASME
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