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Proceedings Papers

Development of a Manufacturing Process for Polyimide-Based Microstructured Devices Using Reactive Ion Etching

Jens Bobers, Maurice Hesselmann, Arndt-Christian Schneider, Jakob Zimmermann, Norbert Kockmann
Proc. ASME. ICNMM2019, ASME 2019 17th International Conference on Nanochannels, Microchannels, and Minichannels, V001T12A002, June 23–26, 2019
Paper No: ICNMM2019-4208
DOI: https://doi.org/10.1115/ICNMM2019-4208
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Topics: Manufacturing, Reactive-ion etching, Geometry, Drops, Etching, Flow (Dynamics), Surface roughness, Anisotropy, Chemical engineering, Experimental design
Proceedings Papers

Evaporation-Induced Cassie Droplets on Superhydrophilic Microstructured Surfaces

Solomon Adera, Rishi Raj, Ryan Enright, Evelyn N. Wang
Proc. ASME. ICNMM2012, ASME 2012 10th International Conference on Nanochannels, Microchannels, and Minichannels, 835-843, July 8–12, 2012
Paper No: ICNMM2012-73224
DOI: https://doi.org/10.1115/ICNMM2012-73224
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Topics: Drops, Evaporation, Wetting, Heat transfer, Superheating, Columns (Structural), Fluids, Photolithography, Reactive-ion etching, Silicon
Proceedings Papers

Characterization of Capillary Flow Within a Homogenously Dispersed Array of Vertical Micropillars

Conan Zhang, Carlos H. Hidrovo
Proc. ASME. ICNMM2010, ASME 2010 8th International Conference on Nanochannels, Microchannels, and Minichannels: Parts A and B, 655-663, August 1–5, 2010
Paper No: FEDSM-ICNMM2010-30526
DOI: https://doi.org/10.1115/FEDSM-ICNMM2010-30526
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Topics: Flow (Dynamics), Fluid dynamics, Columns (Structural), Dimensions, Pumps, Fluidic devices, Geometry, Optimization, Reactive-ion etching, Semiconductor wafers
Proceedings Papers

Fabrication of Nanochannels on Polymer Thin Film

Vinh-Nguyen Phan, Patrick Abgrall, Nam-Trung Nguyen, Peige Shao, Jeroen Anton Van Kan
Proc. ASME. ICNMM2009, ASME 2009 7th International Conference on Nanochannels, Microchannels and Minichannels, 921-925, June 22–24, 2009
Paper No: ICNMM2009-82057
DOI: https://doi.org/10.1115/ICNMM2009-82057
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Topics: Manufacturing, Polymers, Thin films, Bonding, Embossing, Atomic force microscopy, Pressure, Reactive-ion etching, Temperature, Dimensions
Proceedings Papers

Effects of Interfacial Position on Drag Reduction in a Superhydrophobic Microchannel

Ryan Enright, Tara Dalton, Tom N. Krupenkin, Paul Kolodner, Marc Hodes, Todd R. Salamon
Proc. ASME. ICNMM2008, ASME 2008 6th International Conference on Nanochannels, Microchannels, and Minichannels, 835-845, June 23–25, 2008
Paper No: ICNMM2008-62251
DOI: https://doi.org/10.1115/ICNMM2008-62251
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Topics: Drag reduction, Microchannels, Columns (Structural), Flow (Dynamics), Pressure drop, Confined flow, Fluids, Lasers, Microscopy, Pressure
Proceedings Papers

Manifold Microchannel Cooler for Direct Backside Liquid Cooling of SiC Power Devices

Lauren Everhart, Nicholas Jankowski, Bruce Geil, Andrew Bayba, Dimeji Ibitayo, Patrick McCluskey
Proc. ASME. ICNMM2007, ASME 5th International Conference on Nanochannels, Microchannels, and Minichannels, 285-292, June 18–20, 2007
Paper No: ICNMM2007-30190
DOI: https://doi.org/10.1115/ICNMM2007-30190
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Topics: Cooling, Manifolds, Microchannels, Design, Engineering simulation, Manufacturing, Pressure drop, Simulation, Flow (Dynamics), Heat
Proceedings Papers

Direct Comparison Between a Variety of Microchannels: Part 1 — Channel Manufacture and Measurement

Cormac Eason, Tara Dalton, Cian O’Mathu´na, Mark Davies, Orla Slattery
Proc. ASME. ICMM2004, ASME 2nd International Conference on Microchannels and Minichannels, 149-156, June 17–19, 2004
Paper No: ICMM2004-2329
DOI: https://doi.org/10.1115/ICMM2004-2329
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Topics: Microchannels, Silicon, Cooling, Flow (Dynamics), Glass, Chemical etching, Sawing, Thermal resistance, Bonding, Dimensions
Proceedings Papers

Pull-In Extension of MEMS Electrostatic Microactuators Using an Active Control Method

Y. Sun, D. Piyabongkarn, R. Rajamani, B. J. Nelson
Proc. ASME. ICMM2005, ASME 3rd International Conference on Microchannels and Minichannels, Part B cont’d, 273-279, June 13–15, 2005
Paper No: ICMM2005-75207
DOI: https://doi.org/10.1115/ICMM2005-75207
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Topics: Microactuators, Microelectromechanical systems, Capacitors, Control equipment, Control systems, Nonlinear dynamics, Plates (structures), Design, Design engineering, Electromagnetic spectrum
Proceedings Papers

Integrated Microfluidic-Microoptical Detection Systems Fabricated by Dry Etching of Soda-Lime Glass

Radoslaw Mazurczyk, Julien Vieillard, Lynda-Lawrence Boum, Aude Bouchard, Yann Chevolot, Pierre Cremillieu, Benjamin Hannes, Stanislas Krawczyk
Proc. ASME. ICNMM2006, ASME 4th International Conference on Nanochannels, Microchannels, and Minichannels, Parts A and B, 1025-1029, June 19–21, 2006
Paper No: ICNMM2006-96034
DOI: https://doi.org/10.1115/ICNMM2006-96034
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Topics: Dry etching, Glass, Microfluidics, Optics, Fluorescence, Ion exchange, Manufacturing, Reactive-ion etching
Proceedings Papers

Development of a Silicon-Based Passive Gas-Liquid Separation System for Microscale Direct Methanol Fuel Cells

C. C. Hsieh, Yousef Alyousef, S. C. Yao
Proc. ASME. ICNMM2006, ASME 4th International Conference on Nanochannels, Microchannels, and Minichannels, Parts A and B, 779-785, June 19–21, 2006
Paper No: ICNMM2006-96084
DOI: https://doi.org/10.1115/ICNMM2006-96084
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Topics: Direct methanol fuel cells, Microscale devices, Separation (Technology), Silicon, Design, Flow (Dynamics), Manufacturing, Bonding, Carbon dioxide, Glass