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Proceedings Papers

Design and Simulation of a MEMS Capacitive Pressure Sensor With Corrugated Membrane and Linear Capacitance-Pressure Response

Mohammad Shavezipur
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A010, August 14–17, 2022
Paper No: DETC2022-90093
https://doi.org/10.1115/DETC2022-90093
View Paper titled, Design and Simulation of a MEMS Capacitive Pressure Sensor With Corrugated Membrane and Linear Capacitance-Pressure Response
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Topics: Capacitance, Design, Membranes, Microelectromechanical systems, Pressure, Pressure sensors, Simulation
Proceedings Papers

A Three Degree of Freedom Model Approach to Enable a MEMS-Based Neural Computing Unit

Mohammad Megdadi, Hamed Nikfarjam, Mohammad Okour, Siavash Pourkamali, Fadi Alsaleem
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A011, August 14–17, 2022
Paper No: DETC2022-90498
https://doi.org/10.1115/DETC2022-90498
View Paper titled, A Three Degree of Freedom Model Approach to Enable a MEMS-Based Neural Computing Unit
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Topics: Degrees of freedom, Microelectromechanical systems
Proceedings Papers

A Small MEMS Neural Network to Classify Human Sitting and Standing Activities

Mohammad Okour, Mohammad Megdadi, Hamed Nikfarjam, Siavash Pourkamali, Fadi Alsaleem
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A012, August 14–17, 2022
Paper No: DETC2022-91236
https://doi.org/10.1115/DETC2022-91236
View Paper titled, A Small MEMS Neural Network to Classify Human Sitting and Standing Activities
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Topics: Artificial neural networks, Microelectromechanical systems
Proceedings Papers

Nuclear Batteries Enable Decades of Uninterrupted Life for Microelectronic Systems

Oliver M. Barham
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A013, August 14–17, 2022
Paper No: DETC2022-89291
https://doi.org/10.1115/DETC2022-89291
View Paper titled, Nuclear Batteries Enable Decades of Uninterrupted Life for Microelectronic Systems
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Topics: Atomic batteries, Sensors, Batteries, Alpha decay, Biomedicine, Biosensors, Electronics, Engineering prototypes, Microelectromechanical systems, Nuclear power
Proceedings Papers

Novel MEMS Capacitive Sensor Excited at Electrical Resonance for Detecting Helium Based on Changes in Air Electrical Properties

Sulaiman Mohaidat, Fadi Alsaleem
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A009, August 14–17, 2022
Paper No: DETC2022-90015
https://doi.org/10.1115/DETC2022-90015
View Paper titled, Novel MEMS Capacitive Sensor Excited at Electrical Resonance for Detecting Helium Based on Changes in Air Electrical Properties
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Topics: Electrical properties, Helium, Leakage, Microelectromechanical systems, Resonance, Sensors
Proceedings Papers

Bistability Condition for Electrostatically Actuated Initially Curved Micro-Beams in the Presence of Curved Electrodes

Lior Medina
Proc. ASME. IDETC-CIE2022, Volume 8: 16th International Conference on Micro- and Nanosystems (MNS), V008T08A005, August 14–17, 2022
Paper No: DETC2022-89669
https://doi.org/10.1115/DETC2022-89669
View Paper titled, Bistability Condition for Electrostatically Actuated Initially Curved Micro-Beams in the Presence of Curved Electrodes
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Topics: Electrodes, Microbeams, Geometry, Design, Engineers, Microelectromechanical systems
Proceedings Papers

Frequency-Amplitude Response of Parametric Resonance of Electrostatically Actuated MEMS Cantilever Beams Driven by Fringe Effect

Miguel A. Martinez, Dumitru I. Caruntu
Proc. ASME. IDETC-CIE2022, Volume 10: 34th Conference on Mechanical Vibration and Sound (VIB), V010T10A027, August 14–17, 2022
Paper No: DETC2022-89962
https://doi.org/10.1115/DETC2022-89962
View Paper titled, Frequency-Amplitude Response of Parametric Resonance of Electrostatically Actuated MEMS Cantilever Beams Driven by Fringe Effect
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Topics: Cantilever beams, Microelectromechanical systems, Resonance
Proceedings Papers

Subharmonic Resonance of One Fourth Order of Electrostatically Actuated MEMS Circular Plates: Amplitude-Frequency Response

Dumitru I. Caruntu, Julio Beatriz, Miguel Martinez
Proc. ASME. IDETC-CIE2021, Volume 10: 33rd Conference on Mechanical Vibration and Sound (VIB), V010T10A027, August 17–19, 2021
Paper No: DETC2021-70415
https://doi.org/10.1115/DETC2021-70415
View Paper titled, Subharmonic Resonance of One Fourth Order of Electrostatically Actuated MEMS Circular Plates: Amplitude-Frequency Response
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Topics: Microelectromechanical systems, Plates (structures), Resonance
Proceedings Papers

Integer Ratio Self-Synchronization in Pairs of Limit Cycle Oscillators

Aditya Bhaskar, B. Shayak, Alan T. Zehnder, Richard H. Rand
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A010, August 17–19, 2021
Paper No: DETC2021-71254
https://doi.org/10.1115/DETC2021-71254
View Paper titled, Integer Ratio Self-Synchronization in Pairs of Limit Cycle Oscillators
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Topics: Limit cycles, Microelectromechanical systems, Synchronization
Proceedings Papers

Multiple Harmonic Lissajous Scanning Patterns for Endomicroscopy With Parametrically-Resonant Micro-Mirrors

Nicholas Chan, Miki Lee, Haijun Lee, Thomas D. Wang, Kenn R. Oldham
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A011, August 17–19, 2021
Paper No: DETC2021-71280
https://doi.org/10.1115/DETC2021-71280
View Paper titled, Multiple Harmonic Lissajous Scanning Patterns for Endomicroscopy With Parametrically-Resonant Micro-Mirrors
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Topics: Microelectromechanical systems, Mirrors, Resonance, Simulation, Oscillations, Density, Imaging, Waves, Dynamics (Mechanics), Endoscopic devices
Proceedings Papers

Multi-Modeshape Reservoir Computing Using a Continuous MEMS Microbeam

Mohammad H. Hasan, Fadi Alsaleem
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A013, August 17–19, 2021
Paper No: DETC2021-71659
https://doi.org/10.1115/DETC2021-71659
View Paper titled, Multi-Modeshape Reservoir Computing Using a Continuous MEMS Microbeam
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Topics: Microbeams, Microelectromechanical systems, Reservoirs, Delays, Arches, Hardware, Time series
Proceedings Papers

A MEMS Tunable Capacitor With Dual Deformation Modes and High Tunability and Linearity

Mahdi Shahi, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A014, August 17–19, 2021
Paper No: DETC2021-69831
https://doi.org/10.1115/DETC2021-69831
View Paper titled, A MEMS Tunable Capacitor With Dual Deformation Modes and High Tunability and Linearity
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Topics: Capacitors, Deformation, Microelectromechanical systems
Proceedings Papers

Mode-Dependent Selective Detection of Humidity and Helium Using Electromagnetically Actuated Clamped Guided MEMS Resonators

Usman Yaqoob, Nizar Jaber, Nouha Alcheikh, Mohammad I. Younis
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A015, August 17–19, 2021
Paper No: DETC2021-71131
https://doi.org/10.1115/DETC2021-71131
View Paper titled, Mode-Dependent Selective Detection of Humidity and Helium Using Electromagnetically Actuated Clamped Guided MEMS Resonators
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Topics: Graphene, Helium, Microelectromechanical systems
Proceedings Papers

Teleoperation Interface for sAFAM, a Solid Articulated Four Axes Microrobot

Moath Alqatamin, Brooke Ritz, Andriy Sherehiy, Douglas Jackson, Ruoshi Zhang, Sri S. Chowdhury, Danming Wei, Dan O. Popa
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A017, August 17–19, 2021
Paper No: DETC2021-71552
https://doi.org/10.1115/DETC2021-71552
View Paper titled, Teleoperation Interface for sAFAM, a Solid Articulated Four Axes Microrobot
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Topics: Actuators, Computer software, Degrees of freedom, Design, Graphical user interfaces, Hardware, Magnification, Microelectromechanical systems, Microscopes, Resolution (Optics)
Proceedings Papers

Comparing Nuclear and Chemical Power Sources for MEMS/NEMS Applications

Oliver M. Barham
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A018, August 17–19, 2021
Paper No: DETC2021-68110
https://doi.org/10.1115/DETC2021-68110
View Paper titled, Comparing Nuclear and Chemical Power Sources for MEMS/NEMS Applications
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Topics: Atomic batteries, Batteries, Chemical energy, Chemical reactions, Density, Electric power generation, Electronics, Energy harvesting, Engineering prototypes, Lithium
Proceedings Papers

Surface Functionalization of Silicon MEMS Biochemical Sensors for the Detection of Foodborne Pathogens

Md Ebrahim Khalil Bhuiyan, Dustin Smith, Eric J. Voss, Chin-Chuan Wei, Mohammad Shavezipur
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A003, August 17–19, 2021
Paper No: DETC2021-69708
https://doi.org/10.1115/DETC2021-69708
View Paper titled, Surface Functionalization of Silicon MEMS Biochemical Sensors for the Detection of Foodborne Pathogens
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Topics: Biosensors, DNA, Microelectromechanical systems, Self-assembly, Sensors, Silicon, Atomic force microscopy, Bacteria, Biological agents, Coating processes
Proceedings Papers

Efficient Response Amplification of Electrothermally Driven Resonators Using Magnets

Ghanimah Abuhaimed, Nizar Jaber, Nouha Alcheikh, Mohammad I. Younis
Proc. ASME. IDETC-CIE2021, Volume 11: 15th International Conference on Micro- and Nanosystems (MNS), V011T11A009, August 17–19, 2021
Paper No: DETC2021-71177
https://doi.org/10.1115/DETC2021-71177
View Paper titled, Efficient Response Amplification of Electrothermally Driven Resonators Using Magnets
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Topics: Bifurcation, Damping, Excitation, Generators, Magnetic fields, Magnets, Microelectromechanical systems, Nanoelectromechanical systems, Pressure, Relaxation (Physics)
Proceedings Papers

Kinematic Design of Deployable Structures With Low Actuation Requirements Based on Pop-Up Folding

Eduardo E. Montano, Edwin A. Peraza Hernandez
Proc. ASME. IDETC-CIE2021, Volume 8A: 45th Mechanisms and Robotics Conference (MR), V08AT08A031, August 17–19, 2021
Paper No: DETC2021-70026
https://doi.org/10.1115/DETC2021-70026
View Paper titled, Kinematic Design of Deployable Structures With Low Actuation Requirements Based on Pop-Up Folding
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Topics: Design, Kinematics, Algorithms, Degrees of freedom, Shapes, Aerospace industry, Microelectromechanical systems, Modeling, Topology
Proceedings Papers

Design and Fabrication of Microelectromechanical Systems

G. K. Ananthasuresh, Sridhar Kota, Selden B. Crary, Kensall D. Wise
Proc. ASME. DETC92, 22nd Biennial Mechanisms Conference: Robotics, Spatial Mechanisms, and Mechanical Systems, 251-258, September 13–16, 1992
Paper No: DETC1992-0222
https://doi.org/10.1115/DETC1992-0222
View Paper titled, Design and Fabrication of Microelectromechanical Systems
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Topics: Design, Manufacturing, Microelectromechanical systems, Blocks (Building materials), Micromachining, Micromechanical devices, Sensors, Boron, Circuits, Dimensions
Proceedings Papers

Conflict Resolution in Concurrent Engineering Processes

Srikanth M. Kannapan, Dean L. Taylor
Proc. ASME. DETC94, 6th International Conference on Design Theory and Methodology, 141-152, September 11–14, 1994
Paper No: DETC1994-0015
https://doi.org/10.1115/DETC1994-0015
View Paper titled, Conflict Resolution in Concurrent Engineering Processes
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Topics: Concurrent engineering, Resolution (Optics), Design, Pressure sensors, Information models, Microelectromechanical systems, Teams, Capacitance, Computer software, Deflection