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Keywords: Talbot effect
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Proceedings Papers

Proc. ASME. IMECE97, Manufacturing Science and Engineering: Volume 1, 369-376, November 16–21, 1997
Paper No: IMECE1997-1112
... enables one to examine the whole wafer surface quickly and simultaneously. In this study, a 1000 lines/inch reference grating is employed as the standard to create a shadow moiré pattern. In addition, the Talbot effect is utilized to adjust the gap, or the so-called Talbot distance, between the grating...