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Keywords: semi-infinite substrate of silicon
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Proceedings Papers

Proc. ASME. IMECE2021, Volume 1: Acoustics, Vibration, and Phononics, V001T01A033, November 1–5, 2021
Paper No: IMECE2021-71096
... Abstract We theoretically investigate with the help of the finite element method, the interaction between aluminum pillars erected on top of a semi-infinite substrate of silicon in the low frequency range. Our interest is to control and manipulate the propagation of surface acoustic waves (SAW...