1-1 of 1
Keywords: wafer surface measurement
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Proc. ASME. IMECE97, Manufacturing Science and Engineering: Volume 1, 369-376, November 16–21, 1997
Paper No: IMECE1997-1112
...″). Experimental results of both 200mm single crystalline and 100 × 90mm polycrystalline wafers are presented. The system can also be fully automated to become an on-line inspection tool. wafer surface measurement shadow moire Talbot effect wiresaw MED-Vol. 6-1, Manufacturing Science and Technology...