Skip Nav Destination
1-2 of 2
Proc. ASME. MICRONANO2008, 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems, 683-687, June 3–5, 2008
Paper No: MicroNano2008-70224
... anodization steps. 3 step anodic oxidation aluminum ordering domains Proceedings of MicroNano08 MicroNano2008 June 3-5, 2008, Clear Water Bay, Kowloon, Hong Kong T A N .O ordering of nanopores in anodic aluminium oxide (AAO) membrane by performing three-step anodic oxidation process. Naturally...
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 601-605, January 10–13, 2007
Paper No: MNC2007-21576
... and micro-sensors. So Electrostatic bonding process mainly is used to bond the fast-ion conductivity materials and the metals. The bonding technique of functionally materials and metals had a significant role in the manufacture of MEMS. In this paper, the L2 aluminum film and β"-Al 2 O 3 sheet were...