Research Papers

Control of Ablation Depth and Surface Structure in P3 Scribing of Thin-Film Solar Cells by a Picosecond Laser

[+] Author and Article Information
Xin Zhao, Yunfeng Cao, Yung C. Shin

Center for Laser-Based Manufacturing,
Purdue University,
West Lafayette, IN 47907;
School of Mechanical Engineering,
Purdue University,
West Lafayette, IN 47907

Qiong Nian, Gary Cheng

Center for Laser-Based Manufacturing,
Purdue University,
West Lafayette, IN 47907;
School of Industrial Engineering,
Purdue University,
West Lafayette, IN 47907

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received April 14, 2014; final manuscript received May 20, 2014; published online July 8, 2014. Assoc. Editor: Hongqiang Chen.

J. Micro Nano-Manuf 2(3), 031007 (Jul 08, 2014) (7 pages) Paper No: JMNM-14-1028; doi: 10.1115/1.4027733 History: Received April 14, 2014; Revised May 20, 2014

In this paper, precise P3 scribing of thin-film solar cells (AZO/CIGS/Mo/Glass) via a picosecond laser is investigated. A parametric study is carried out for P3 scribing to study the effects of laser fluence and overlap ratio on ablation depth and slot quality, supported by the numerical prediction using a two-temperature model. The optimum scribing conditions are determined, and the potential processing speed is increased. Laser induced periodic surface structures are also presented after the scribing process, which can potentially enhance the absorption of the cell surface and consequently increase the cell efficiency.

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Fig. 1

Experimental setup

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Fig. 3

Schematic diagram of the model

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Fig. 4

Ablation depth versus overlap ratio under different laser fluences. Repetition rate: 10 kHz, scanning number: 1. Dashed line: thickness of AZO and CIGS layers.

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Fig. 5

SEM image (left), and EDS measurement (right) of the slot. Laser fluence: 4.5 J/cm2, overlap ratio: 81%, ablation depth: 1.3 μm.

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Fig. 6

SEM image (left), and EDS measurement (right) of the slot. Laser fluence: 4.5 J/cm2; overlap ratio: 87%; ablation depth: 1.95 μm.

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Fig. 7

SEM image (left) and EDS measurement (right) of the slot. Laser fluence: 4.5 J/cm2; overlap ratio: 97%; ablation depth: 2.45 μm.

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Fig. 8

SEM image of the surface structure on Mo layer. Laser fluence: 4.5 J/cm2, overlap ratio: 87%.

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Fig. 9

Periodic structure on CIGS surface. Laser fluence: 0.75 J/cm2 and overlap ratio: 69%.

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Fig. 10

SEM image of the surface structure on CIGS layer: (a) large scale and (b) zoom in to the LIPSS. Laser fluence: 4.5 J/cm2, overlap ratio: 97%.

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Fig. 11

SEM images of surface structures of CIGS layer at different laser fluences and overlap ratios: (a) original surface structure, (b) fluence: 0.75 J/cm2, overlap ratio: 34%, (c) fluence: 1.5 J/cm2, overlap ratio: 56%, and (d) fluence: 3 J/cm2, overlap ratio: 34%



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