Technical Brief

A Microresonant Gas Sensor by Micro-Electroforming

[+] Author and Article Information
Lizhong Xu

Mechanical Engineering Institute,
Yanshan University,
Qinhuangdao 066004, China
e-mail: xlz@ysu.edu.cn

Yulei Liu

Mechanical Engineering Institute,
Yanshan University,
Qinhuangdao 066004, China
e-mail: liuyulei@ysu.edu.cn

Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received April 7, 2015; final manuscript received September 28, 2015; published online October 23, 2015. Assoc. Editor: Nicholas Fang.

J. Micro Nano-Manuf 4(1), 014501 (Oct 23, 2015) (4 pages) Paper No: JMNM-15-1019; doi: 10.1115/1.4031740 History: Received April 07, 2015; Revised September 28, 2015

The microsensors are mainly made with the single crystal silicon which requires expensive equipments and complicated process. Here, the micro-electroforming technology is used to fabricate the microresonant gas sensor. The fabricating process of the microresonant gas sensor is proposed. A microcantilever beam resonator 900 μm long, 300 μm wide, and 10 μm thick is fabricated. The resonant frequency shift is measured when exposed to ethanol vapor. Results show that the shift in the resonant frequency is approximately proportional to the ethanol vapor concentration, and the detection accuracy to ethanol vapor with the sensor is about 1 ppm per Hz frequency shift.

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Grahic Jump Location
Fig. 1

Fabricating process of the microresonant gas sensor

Grahic Jump Location
Fig. 2

Microcantilever beam and cathode units on composite plate: (a) Cathode units on composite plate, (b) microcantilever beam, and (c) microprecision carving machine

Grahic Jump Location
Fig. 3

Test system and the open loop test results: (a) Test system and (b) open-loop test results

Grahic Jump Location
Fig. 4

Resonant frequency shift when exposed to ethanol vapor: (a) Real-time resonant frequency and (b) frequency shift



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