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Keywords: precision motion stageClose
Article Type: Research-Article
J. Comput. Nonlinear Dynam. August 2023, 18(8): 081005.
Paper No: CND-22-1268
Published Online: May 4, 2023
...Sunit K. Gupta; Ehab E. Basta; Oumar R. Barry The application of servocontrolled mechanical-bearing-based precision motion stages (MBMS) is well-established in advanced manufacturing, semiconductor industries, and metrological applications. Nevertheless, the performance of the motion stage...