Abstract

It is recently conceptualized that nano-scale machining might be achieved by coupling electron emission with radiation transfer. A laser may be used to heat a workpiece to a threshold temperature, and a nano-probe might then transfer additional energy via electron emission to remove a minute amount of material. To investigate this hypothesis, a detailed numerical study is presented. The electron-beam transport is modeled using a Monte Carlo approach, and a radiation transfer model that includes Fresnel reflections is adapted to simulate laser heating. The numerical study suggests that approximately 0.5 W from a single electron-beam is sufficient to initialize local evaporation from a gold film. With the use of a laser, the required power can be halved if the film is sufficiently thin. This paper describes the details of the numerical study and establishes guidelines for such nano-scale machining processes.

Issue Section:
Research Paper
Keywords:
Heating, Heat Transfer, Machining, Monte Carlo, Nanoscale, electron beam machining, electron emission, evaporation, radiative transfer, laser beam machining, Monte Carlo methods, nanotechnology
Topics:
Cathode ray oscilloscopes, Electron beams, Electrons, Lasers, Machining, Temperature, Evaporation, Heating, Nanoscale phenomena

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Copyright © 2004
 by American Society of Mechanical Engineers
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