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Keywords: defect localization
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Manuf. Sci. Eng. July 2024, 146(7): 070906.
Paper No: MANU-23-1591
Published Online: May 9, 2024
...@purdue.edu 24 09 2023 29 03 2024 01 04 2024 09 05 2024 Graphical Abstract Figure semiconductor wafer inspection automated visual inspection autonomous data annotation defect localization metrology semiconductor manufacturing sensing monitoring and diagnostics...