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Keywords: diffraction gratings
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 807–812.
Published Online: February 4, 2005
... a micrograting interferometer for use in measuring MEMS devices. The sensor is also capable of making dynamic measurements, qualifying the functionality of the MEMS devices. The system employs a phase sensitive diffraction grating for interferometric axial resolution and a microfabricated lens for improved...