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Keywords: distance measurement
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. May 2005, 127(2): 394–401.
Published Online: April 25, 2005
... for publication in the JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING . Manuscript received July 8, 2003; revised August 22, 2004. Associate Editor: J. Li. 08 July 2003 22 August 2004 25 04 2005 copper extrusion capacitive sensors distance measurement displacement control three...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 807–812.
Published Online: February 4, 2005
... interferometry inspection diffraction gratings distance measurement The schematic of the experimental setup of the nondeformable grating interferometer is depicted in Fig. 6 . A HeNe laser is used as the interferometer light source, which is incident upon the aperture and grating of the μSGI. A portion...