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Keywords: light interferometry
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Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2006, 128(4): 1006–1013.
Published Online: March 7, 2006
... holographic interferometry light interferometry wheels engines combustion coordinate measuring machines measurement by laser beam light coherence Laser holographic interferometry applies coherent light to extract the 3D surface profile of objects for sub- μ m level precision measurement...
Journal Articles
Publisher: ASME
Article Type: Technical Papers
J. Manuf. Sci. Eng. November 2004, 126(4): 807–812.
Published Online: February 4, 2005
... transformations and distortion corrections has shown promising results in generating 3D metrology data 10 . White light interferometry is the most commonly used technology for creating surface maps of MEMS devices 11 . This technique utilizes broad spectrum light and an interferometer to create interferograms...
Journal Articles
Publisher: ASME
Article Type: Technical Briefs
J. Manuf. Sci. Eng. August 2000, 122(3): 590–593.
Published Online: October 1, 1999
...Roy J. Schimmel, Graduate Research Assistant; Jairam Manjunathaiah, Graduate Research Assistant; William J. Endres, Assistant Professor, Mem. ASME A new, noncontact instrument, based on white light interferometry, is used to measure the edge radii of cutting tools with measurement errors of less...