Micromanipulators play an important role in the precision engineering field from optical stages to micro-electromechanical systems for their excellent performances. In this paper, a 6-DOF perpendicular parallel micromanipulator (PPMM) is proposed and its prototype is developed. The isotropy and decoupled characteristics of the 6-DOF PPMM are discussed. The relationship among input-force, payload, stiffness, and displacement (IPSD) of the 6-DOF PPMM is studied and the model of the relationship among the IPSD is derived in an analytical style. The relation between voltage value of piezoelectric actuator and output displacement is obtained base on an IPSD model. Finally, the simulations by finite element method and the test of the prototype of the 6-DOF PPMM are performed. Compared with the results of simulations and the test, the feasibility of IPSD model is verified. The proposed model is useful for both digital control of the 6-DOF PPMMs and design of the micromanipulators.
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e-mail: fengg@sjtu.edu.cn
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February 2010
Research Papers
Relationship Among Input-Force, Payload, Stiffness, and Displacement of a 6-DOF Perpendicular Parallel Micromanipulator
Yi Yue,
Yi Yue
State Key Laboratory of Mechanical System and Vibration,
Shanghai Jiaotong University
, Shanghai 200240, P.R. China
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Feng Gao,
Feng Gao
State Key Laboratory of Mechanical System and Vibration,
e-mail: fengg@sjtu.edu.cn
Shanghai Jiaotong University
, Shanghai 200240, P.R. China
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Xianchao Zhao,
Xianchao Zhao
State Key Laboratory of Mechanical System and Vibration,
Shanghai Jiaotong University
, Shanghai 200240, P.R. China
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Q. Jeffrey Ge
Q. Jeffrey Ge
Department of Mechanical Engineering,
State University of New York at Stony Brook
, Stony Brook, NY 11794-2300
Search for other works by this author on:
Yi Yue
State Key Laboratory of Mechanical System and Vibration,
Shanghai Jiaotong University
, Shanghai 200240, P.R. China
Feng Gao
State Key Laboratory of Mechanical System and Vibration,
Shanghai Jiaotong University
, Shanghai 200240, P.R. Chinae-mail: fengg@sjtu.edu.cn
Xianchao Zhao
State Key Laboratory of Mechanical System and Vibration,
Shanghai Jiaotong University
, Shanghai 200240, P.R. China
Q. Jeffrey Ge
Department of Mechanical Engineering,
State University of New York at Stony Brook
, Stony Brook, NY 11794-2300J. Mechanisms Robotics. Feb 2010, 2(1): 011007 (9 pages)
Published Online: November 24, 2009
Article history
Received:
February 6, 2009
Revised:
August 2, 2009
Published:
November 24, 2009
Citation
Yue, Y., Gao, F., Zhao, X., and Ge, Q. J. (November 24, 2009). "Relationship Among Input-Force, Payload, Stiffness, and Displacement of a 6-DOF Perpendicular Parallel Micromanipulator." ASME. J. Mechanisms Robotics. February 2010; 2(1): 011007. https://doi.org/10.1115/1.4000525
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