As one of the most promising anode materials for high-capacity lithium ion batteries (LIBs), silicon nanowires (SiNWs) have been studied extensively. The metal-assisted chemical etching (MACE) is a low-cost and scalable method for SiNW synthesis. Nanoparticle emissions from the MACE process, however, are of grave concerns due to their hazardous effects on both occupational and public health. In this study, both airborne and aqueous nanoparticle emissions from the MACE process for SiNWs with three sizes of 90 nm, 120 nm, and 140 nm are experimentally investigated. The prepared SiNWs are used as anodes of LIB coin cells, and the experimental results reveal that the initial discharge and charge capacities of LIB electrodes are 3636 and 2721 mAh g−1 with 90 nm SiNWs, 3779 and 2712 mAh g−1 with 120 nm SiNWs, and 3611 and 2539 mAh g−1 with 140 nm SiNWs. It is found that for 1 kW h of LIB electrodes, the MACE process for 140 nm SiNWs produces a high concentration of airborne nanoparticle emissions of 2.48 × 109 particles/cm3; the process for 120 nm SiNWs produces a high mass concentration of aqueous particle emissions, with a value of 9.95 × 105 mg/L. The findings in this study can provide experimental data of nanoparticle emissions from the MACE process for SiNWs for LIB applications and can help the environmental impact assessment and life cycle assessment of the technology in the future.
Skip Nav Destination
Article navigation
March 2019
This article was originally published in
Journal of Micro and Nano-Manufacturing
Research-Article
Nanoparticle Emissions From Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium Ion Batteries
Fenfen Wang,
Fenfen Wang
Department of Mechanical
and Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
and Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
Search for other works by this author on:
Xianfeng Gao,
Xianfeng Gao
Department of Mechanical Engineering,
University of Wisconsin-Milwaukee,
Milwaukee, WI 53211
University of Wisconsin-Milwaukee,
Milwaukee, WI 53211
Search for other works by this author on:
Lulu Ma,
Lulu Ma
Department of Mechanical Engineering,
University of Wisconsin-Milwaukee,
Milwaukee, WI 53211
University of Wisconsin-Milwaukee,
Milwaukee, WI 53211
Search for other works by this author on:
Chris Yuan
Chris Yuan
Department of Mechanical and
Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
1Corresponding author.
Search for other works by this author on:
Fenfen Wang
Department of Mechanical
and Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
and Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
Xianfeng Gao
Department of Mechanical Engineering,
University of Wisconsin-Milwaukee,
Milwaukee, WI 53211
University of Wisconsin-Milwaukee,
Milwaukee, WI 53211
Lulu Ma
Department of Mechanical Engineering,
University of Wisconsin-Milwaukee,
Milwaukee, WI 53211
University of Wisconsin-Milwaukee,
Milwaukee, WI 53211
Chris Yuan
Department of Mechanical and
Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
Aerospace Engineering,
Case Western Reserve University,
Cleveland, OH 44106
1Corresponding author.
Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO-AND NANO-MANUFACTURING. Manuscript received September 12, 2018; final manuscript received December 12, 2018; published online April 15, 2019. Assoc. Editor: Marriner Merrill.
J. Micro Nano-Manuf. Mar 2019, 7(1): 011001 (10 pages)
Published Online: April 15, 2019
Article history
Received:
September 12, 2018
Revised:
December 12, 2018
Citation
Wang, F., Gao, X., Ma, L., and Yuan, C. (April 15, 2019). "Nanoparticle Emissions From Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium Ion Batteries." ASME. J. Micro Nano-Manuf. March 2019; 7(1): 011001. https://doi.org/10.1115/1.4042383
Download citation file:
Get Email Alerts
Cited By
Aerosol Jet and Inkjet Printing Methods for Die-Level Packaging of Custom MEMS Devices
J. Micro Nano Sci. Eng
Comparative Analysis of Simultaneous Electrochemical and Electrodischarge Machining Process
J. Micro Nano Sci. Eng (December 2024)
Related Articles
Environmental Sustainability of Metal-Assisted Chemical Etching of Silicon Nanowires for Lithium-Ion Battery Anode
J. Electrochem. En. Conv. Stor (February,2020)
Bubble Effects on Manufacturing of Silicon Nanowires by Metal-Assisted Chemical Etching
J. Manuf. Sci. Eng (September,2023)
Effects of Bubbles on Manufacturing Gold Dendrites and Silicon Nanowires Through the Fluoride-Assisted Galvanic Replacement Reaction
J. Manuf. Sci. Eng (November,2023)
Hyperspectral Analysis of Silicon Nanowires Manufactured Through Metal-Assisted Chemical Etching
J. Manuf. Sci. Eng (February,2025)
Related Proceedings Papers
Related Chapters
Analysis of Optical Properties of Silicon Nanowire Arrays Using Effective Medium Theory
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
Defining Joint Quality Using Weld Attributes
Ultrasonic Welding of Lithium-Ion Batteries
Motion Analysis for Multilayer Sheets
Ultrasonic Welding of Lithium-Ion Batteries