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Keywords: capacitance
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Nanotechnol. Eng. Med. November 2010, 1(4): 041003.
Published Online: October 21, 2010
...P. A. Manoharan; D. Nedumaran Design and simulation of MEMS based capacitive sensor with doubly supported serpentine meander structure for millibar pressure applications proposed in this work is analyzed using INTELLISUITE ™ and NISA ™ softwares. In this model, microsensing membrane (MSM...
