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Keywords: fringing field
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Journal Articles
Publisher: ASME
Article Type: Research Papers
J. Nanotechnol. Eng. Med. November 2010, 1(4): 041003.
Published Online: October 21, 2010
... of pressure load. The spring constant and the effect of fringing field capacitance is evaluated to optimize the design. The key factors of design information for the fabrication of millibar pressure sensor are analyzed. The proposed model discussed in the earlier section is limited to (i) the dynamic...
