Small and lightweight structures have very high natural frequencies and small elastic displacement compared to ordinary structures. Due to limited excitation bandwidth and relatively large size of pick up devices, conventional modal testing facilities are not feasible for testing MEMS structures. A modal testing system based on the base excitation principle was developed in this research. In the meantime, the associated mathematical model for frequency response functions was derived as well. Testing structures are mounted on a rigid platform that can move essentially with only one translational degree of freedom. An electric discharge pulse strikes the platform to provide a very wide band excitation. Laser Doppler vibrometers are used to pick up both input and output signals. Since these signals are picked up without contacting structures, the structural dynamic characteristics remain intact without any distortion. With this system, modal parameters of a miniature structure can be extracted, and the receptance functions are synthesized successfully.
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January 2001
Technical Papers
On the Modal Testing of Microstructures: Its Theoretical Approach and Experimental Setup
Yuan-Fang Chou, Professor,
Yuan-Fang Chou, Professor
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, Republic of China
11
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Li-Chung Wang, Graduate Student
Li-Chung Wang, Graduate Student
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, Republic of China
Search for other works by this author on:
Yuan-Fang Chou, Professor
11
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, Republic of China
Li-Chung Wang, Graduate Student
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan 10617, Republic of China
Contributed by the Technical Committee on Vibration and Sound for publication in the JOURNAL OF VIBRATION AND ACOUSTICS. Manuscript received Oct. 1999; revised Aug. 2000. Associate Editor: M. I. Friswell.
J. Vib. Acoust. Jan 2001, 123(1): 104-109 (6 pages)
Published Online: August 1, 2000
Article history
Received:
October 1, 1999
Revised:
August 1, 2000
Citation
Chou, Y., and Wang, L. (August 1, 2000). "On the Modal Testing of Microstructures: Its Theoretical Approach and Experimental Setup ." ASME. J. Vib. Acoust. January 2001; 123(1): 104–109. https://doi.org/10.1115/1.1320814
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